[1] Jin Guofan, Tan Qiaofeng. Binary optics[J]. Optoelectronic Technology and Information, 2001, 14(5): 1-10. (in Chinese)
[3] Zhang Kangwei. Research on the diffraction efficiency of multi-layer diffractive optical elements[D]. Changchun: Changchun University of Science and Technology, 2010. (in Chinese)
[5] Yang Liangliang. Studies on diffraction efficiency of multilayer diffractive optical elements[D]. Changchun: Changchun University Of Science And Technology, 2013. (in Chinese)
[6] Dale A, Buralli G, Michael Morris, et al. Optical performance of holographic kinoforms[J]. Applied Optics, 1989, 28(5): 976-983.
[7] Sun Ting, Jiao Mingyin, Zhang Yuhong. Comparison analysis on the diffractive efficiency of single-layer and double-layer harmonic diffractive optical element[J]. Infrared and Laser Engineering, 2009, 38(4): 622-624. (in Chinese)
[8] Bai Jian, Ma Tao, Shen Yibing, et al. Characteristic analysis of multi-layer diffractive elements[J]. Infrared and Laser Engineering, 2006, 35(22): 44-47. (in Chinese)
[10] Li Sitao, Ye Jiaxiong, Ruan Yu, et al. Fabrication and error analysis of binary optical elements[J]. Optoelectronic Technology and Information, 2000, 13(5): 24-29. (in Chinese)
[11] Adam J Caley, Markus Braun, Andrew J W, et al. Analysis of multimask fabrication errors for diffractive optical elements[J]. Applied Optics, 2007, 46(12): 2180-2188.
[12] Yin Kewei. Research on stray light in diffractive optical system[D]. Beijing: University of Chinese Academy of Sciences, 2014. (in Chinese)
[13] Sun Yanjun. Study on photolithography technology of eight-step binary optical elements. [D]. Changchun: Changchun University of Science and Technology, 2007. (in Chinese)
[14] Ye Jun, Xu Qiao, Hou Xiyun, et al. Study of alignment error of 8-levels binary optics elementswith layer by layer analysis method[J]. Journal of Zhejiang University, 1999, 33(2): 157-162. (in Chinese)
[15] Zheng Xuezhe, Yan Yingbai, Jin Guofan, et al. Effect of alignment error on binary optics elementefficiency[J]. Journal of Optoelectronics·Laser, 1997, 8(4): 241-245. (in Chinese)
[17] Li Hongjun, Zhao Jingli, Lu Zhenwu, et al. Linewidth error in fabrication of binary optical element[J]. Journal of Optoelectronics Laser, 2000, 11(3): 279-297. (in Chinese)
[19] Yasuyuki Unno. Point-spread function for binary diffractive lenses fabricated with misaligned masks[J]. Applied Optics, 1998, 37(16): 3401-3407.