The manufacture of high-line-density X-ray transmission self-focusing varied line-space (VLS) gratings for X-ray spectroscopy by using electron beam lithography is reported. Firstly,the VLS gratings are automatically optimized and generated by the macro program. Then using the electron beam lithography and micro-electroplating technology,the VLS gratings are fabricated on polyimide membrane substrate. The 2000 lp/mm X-ray transmission VLS gratings are successfully obtained. It can be seen that the line space of the gratings are all desired. The calibration results of diffraction efficiency of the VLS gratings indicate that the VLS gratings have promising abilities to significantly improve the diffraction intensity and spectrum resolution in the central wavelength.