• Journal of the Chinese Ceramic Society
  • Vol. 53, Issue 1, 1 (2025)
WANG Hu, WANG Lanxi, ZHOU Hui, LI Xuelei..., YANG Miao, LI Kun, NI Zhuang, LI Zhonghua, WANG Zhimin, ZUO Huaping and HE Yanchun|Show fewer author(s)
Author Affiliations
  • Science and Technology on Vacuum Technology and Physics Laboratory, Lanzhou Institute of Physics, Lanzhou 730000, China
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    DOI: 10.14062/j.issn.0454-5648.20240195 Cite this Article
    WANG Hu, WANG Lanxi, ZHOU Hui, LI Xuelei, YANG Miao, LI Kun, NI Zhuang, LI Zhonghua, WANG Zhimin, ZUO Huaping, HE Yanchun. Effect of Oxygen Flow Rate on Atomic Oxygen Resistance Performance of Siloxane Coatings Deposited by Plasma-Enhanced Chemical Vapor Deposition[J]. Journal of the Chinese Ceramic Society, 2025, 53(1): 1 Copy Citation Text show less
    References

    [2] MILLER K R S. Atomic oxygen effects. Spacecraft anomalies and failures workshop-Act II[R]. Chantilly, VA. July 24, 2014.

    [3] BANKS A B, LENCZEWSKI M, DEMKO R. Durability issues for the protection of materials from atomic oxygen attack in low earth orbit[R]. NASA/TM--2002-211830.

    [5] GROH De K K, BANKS A B. Atomic oxygen erosion data from the MISSE 2-8 Missions[R]. NASA/TM—2019-219982.

    [6] YANG X, ZHANG K F, LI Y, et al. Prediction of erosion characteristics of polyimide with different defect shape pairs based on Monte Carlo method[J]. Mater Today Commun, 2021, 28: 102638.

    [7] GROH De K K, BANKS B A, YI GT, et al. Erosion results of the MISSE 7 polymers experiment and zenith polymers experiment after 1.5 years of space exposure[R]. NASA/TM—2016-219167, 2016.

    [10] LI Y, LI Z H, LI D T, et al. Roll-to-roll fabrication of large-scale polyorgansiloxane thin film with high flexibility and ultra-efficient atomic oxygen resistance[J]. Plasma Sci Technol, 2022, 24(6): 065505.

    [11] LI Y, LI Z H, HE Y C, et al. Facile synthesis of atomic oxygen-resistant methyl silicone rubber-coated Kapton film for photovoltaic solar array blanket in low Earth orbit[J]. J Coat Technol Res, 2022: 623-633.

    [14] SCHWARZ J, SCHMIDT M, OHL A. Synthesis of plasma- polymerized hexamethyldisiloxane (HMDSO) films by microwave discharge[J]. Surf Coat Technol, 1998, 98(1-3): 859-864.

    [15] WALKER M, BAUMGRTNER K M, FEICHTINGER J, et al. Barrier properties of plasma-polymerized thin films[J]. Surf Coat Technol, 1999, 116-119: 996-1000.

    [16] WAVHAL D S, ZHANG J M, STEEN M L, et al. Investigation of gas phase species and deposition of SiO2 films from HMDSO/O2 plasmas[J]. Plasma Process Polym, 2006, 3(3): 276-287.

    [17] GENGENBACH T R, GRIESSER H J. Post-deposition ageing reactions differ markedly between plasma polymers deposited from siloxane and silazane monomers[J]. Polymer, 1999, 40(18): 5079-5094.

    [18] FANELLI F, D’AGOSTINO R, FRACASSI F. GC-MS investigation of hexamethyldisiloxane-oxygen fed cold plasmas: Low pressure versus atmospheric pressure operation[J]. Plasma Process Polym, 2011, 8(10): 932-941.

    WANG Hu, WANG Lanxi, ZHOU Hui, LI Xuelei, YANG Miao, LI Kun, NI Zhuang, LI Zhonghua, WANG Zhimin, ZUO Huaping, HE Yanchun. Effect of Oxygen Flow Rate on Atomic Oxygen Resistance Performance of Siloxane Coatings Deposited by Plasma-Enhanced Chemical Vapor Deposition[J]. Journal of the Chinese Ceramic Society, 2025, 53(1): 1
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