• Microelectronics
  • Vol. 51, Issue 2, 251 (2021)
LI Tongshuai1、2、3, WANG Fang2、3, WANG Kewei1、2、3, BU Jianhui2、3, HAN Zhengsheng1、2、3, and LUO Jiajun2、3
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    DOI: 10.13911/j.cnki.1004-3365.200231 Cite this Article
    LI Tongshuai, WANG Fang, WANG Kewei, BU Jianhui, HAN Zhengsheng, LUO Jiajun. Study on Thermal Resistance of 90 nm PDSOI MOSFETs[J]. Microelectronics, 2021, 51(2): 251 Copy Citation Text show less
    References

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    [5] MOHAMED M,AKSAMIJA Z,VITALE W,et al. A conjoined electron and thermal transport study of thermal degradation induced during normal operation of multigate transistors [J]. IEEE Trans Elec Dev, 2014, 61(4): 976-983.

    [6] BHOL S, MISHRA S, MOHANTY S S, et al. Investigation of a nanoscale grooved stepped gate MOSFET to explore the self-heating effect [C] ∥ DEVIC. Kalyani, India. 2019: 49-52.

    [8] WEI J,FUNG S K H,LIU W D,et al. Self-heating characterization for SOI MOSFET based on AC output conductance [C] ∥ IEDM. Washington D C, USA. 1999: 175-178.

    [9] POLONSKY S, JENKINS K A. Time-resolved measurements of self-heating in SOI and strained-Si MOSFETs using off-state leakage current luminescence [C] ∥ ISDRS. Washington D C, USA. 2003: 359-360.

    [10] SU L T, GOODSON K E, ANTONIADIS D A. Measurement and modeling of self-heating effects in SOI nMOSFETs [C] ∥ IEDM. San Francisco, CA, USA. 1992: 357-360.

    [11] BUNYAN R J T, UREN M J, ALDERMAN C. Use of noise thermometry to study the effects of self-heating in submicrometer SOI MOSFETs [J]. IEEE Electron Device Lett, 1992, 13(5): 279-281.

    [12] WAV H, SU P, FUNG S K H, et al. RF modeling for FDSOI MOSFET and self heating effect on RF parameter extraction [C] ∥ NSTI Nanotech. Anaheim, CA, USA. 2005: 151-154.

    [13] ASHEGHI M, KURABAYASHI K, KASNAVI R, et al. Thermal conduction in doped single-crystal silicon films [J]. J Appl Phys, 2002, 91(8): 5079-5088.

    LI Tongshuai, WANG Fang, WANG Kewei, BU Jianhui, HAN Zhengsheng, LUO Jiajun. Study on Thermal Resistance of 90 nm PDSOI MOSFETs[J]. Microelectronics, 2021, 51(2): 251
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