• Journal of Atmospheric and Environmental Optics
  • Vol. 1, Issue 1, 73 (2006)
Li-na ZENG1、*, Ying-jie ZHAO2, and Jing-chang ZHONG2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: Cite this Article
    ZENG Li-na, ZHAO Ying-jie, ZHONG Jing-chang. Experimental Study on AlGaAs Wet Oxidation Characteristics[J]. Journal of Atmospheric and Environmental Optics, 2006, 1(1): 73 Copy Citation Text show less
    References

    [1] Choquette K D, Schneider R P, et al. Electron Lett, 1994, 30(24): 2043~2045.

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    [3] Choquette K D, Lear K L, et al. IEEE Photonics Technol, 1995, 7(11): 1237~1239.

    [4] Zhang Yi, Pan Zhong, Du Yun, et al. Influence of process condition of AlAs selective wet oxidation on oxidizing rate[J]. Chinese Journal of Semiconductors, 1999, 20(3): 260~264.

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    [6] Osinski M, Svimonishvili T, Smolyakov G A, et al.SPIE conference of design, fabraction and characterization of photonic devices[A]. Singapore:SPIE[C], 1999, 3896: 534~546.

    [7] Dallesasse J M, Holonyak Jr N, Sugg A R,et al. Hydrolyzation oxidation of AlxGa1-xAs AlAs-GaAs quantum well heterostructures and superlattices[J]. Appl Phys Lett, 1990, 57(26):2844~2846.

    [8] Gennady A. Smolyakov, Vladimir A, et al. SPIE conference on physics and simulation of optoelctronic devices Ⅶ[A]. San Jose, California:SPIE[C], 1999, 3625: 324~335.

    [9] Dallesasse J M, EI-Zein N, Holonyak N, et al.Environmental degradation of AlxGa1-xAs-GaAs quantum-well heterostructures[J]. J Appl Phys,1990, 68(5): 2235~2237.

    [10] Takamori T, Takemase K, Kamijoh T. Interface structure of selectively oxidized AlAs/GaAs[J].Appl Phys Lett, 1996, 69(5): 659~661.

    [11] Choquette K D, Geib K M, Chui H C, et al. Selective oxidation of buried AlGaAs versus AlAs layers[J]. Appl Phys Lett, 1996, 69(10): 1385~1386.

    [12] Kang Xuejun, Lin Shiming, Gao Junhua, et al.Room temperature CW GaAs/AlGaAs vertical cavity surface emitting semiconductor laser fabricated by selective oxidation and selective etching[J]. Chinese Journal of Semiconductors, 1996,17(11): 873~874.

    [13] Osinski M, Svimonishvili T. Temperature and thickness dependence of steam oxidation of AlAs in cylindrical mesa structures[J]. J IEEE Photonics Technology Letters, 2001, 13: 688~689.

    ZENG Li-na, ZHAO Ying-jie, ZHONG Jing-chang. Experimental Study on AlGaAs Wet Oxidation Characteristics[J]. Journal of Atmospheric and Environmental Optics, 2006, 1(1): 73
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