[3] Jean M. Bennett. Recent developments in surface roughness characterization. Engng. Opt., 1993, 6(1): 1～9

[4] E. L. Church, P. E. Takacs. Instrumental effects in surface finish measurement. Proc. SPIE, 1988, 1009: 46～55

[5] P. E. Takacs, E. L. Church. A step-height standard for surface profiler calibration. Proc. SPIE, 1993, 1995: 235～244