• Journal of Infrared and Millimeter Waves
  • Vol. 22, Issue 2, 109 (2003)
[in Chinese], [in Chinese], and [in Chinese]
Author Affiliations
  • [in Chinese]
  • show less
    DOI: Cite this Article
    [in Chinese], [in Chinese], [in Chinese]. OPTICAL AND THERMAL DESIGN FOR MICROBOLOMETER[J]. Journal of Infrared and Millimeter Waves, 2003, 22(2): 109 Copy Citation Text show less
    References

    [1] Wood R A. Uncooled thermal imaging with monolithic silicon focal arrays.SPIE,1993,2020:33-37

    [2] Raymond S B. Uncooled IR imaging:technology for the next generation.SPIE,1999,3698:110-118

    [3] Sherif S, Paolo F, Kris B,et al.Characterization and optimization of infrared poly SiGe bolometers.IEEE Trans. on Electron Decives,1999, 46(4):675-681

    [4] Hyung K L,Jun B Y, Euisik Y,et al.A high fill-factor Infrared bolometer using micromachined multilevel electrothermal structures,IEEE Ttrans.on Electron Devices,1999,46(7):1489-1491

    [5] Liddiard K C, Unewisse D H, Reinhold O. Design and fabrication of thin film monolithic uncooled infrared detector arrays.SPIE, 1994,2225:62-71

    [6] Tsutomu I, Kouichi A,et al.1/f noise in a-Si1-xCx : H thin films as novel thermistor materials for micro-machined IR sensors.Journal of Non-Crystalline Solids,1998,10:1345-1348

    [8] Unewisse M H, Passnore S J, Liddiard K C, et al.Performance of uncooled semiconductor film bolometer infrared detectors.SPIE,1994,2269:43-47

    [11] Ward L. The optical constants of bulk materials and films.England:Philadelphia Adam Hilger Press,1988:55-62

    [12] Savage J A.Infrared optical materials and their antireflection coatings.Boston:Adam Hilger Press,1985:234-258

    [in Chinese], [in Chinese], [in Chinese]. OPTICAL AND THERMAL DESIGN FOR MICROBOLOMETER[J]. Journal of Infrared and Millimeter Waves, 2003, 22(2): 109
    Download Citation