Author Affiliations
11. Material Science and Engineering School, Dalian University of Technology, Dalian 116024, China22. Key Laboratory for Material Modification by Laser, Ion and Electron Beams, Ministry of Education, Dalian University of Technology, Dalian 116024, Chinashow less
1. Schematic diagram of enhanced magnetic filtered pulse bias arc ion plating apparatus
2. SEM surface images of CrAlN-DLC films
3. SEM surface image and element mappings of CrAlN-DLC 1# film
4. Compositions of CrAlN-DLC films deposited at different arc current ratios
5. GI-XRD patterns of CrAlN-DLC films
6. (a) Raman spectra of CrAlN-DLC films and (b) ID/IG, G peak position and gFWHM changed with C content in the films
7. (a) C1s, (b) Cr2p, (c) Al2p, and (d) N1s XPS spectra of CrAlN-DLC films, and fitting results of (e) C1s, (f) Cr2p, (g) Al2p, and (h) N1s XPS peaks for (Cr9.5Al8.5N7.4)-C74.6 film
8. Hardness (H), elastic modulus (E) of CrAlN-DLC films
9. Friction curves of CrAlN-DLC films
10. Cross-sectional profiles of wear scars on samples
Sample | Arc current/A | Arc current
ratio, IC/ICrAl | Gas flow/sccm | Pulsed bias | Deposition
time/min
|
---|
CrAl | C | N2 | Ar | Frequency/Hz | Amplitude/V | Duty cycle/% |
---|
CrAlN-DLC 1# | 90 | 30 | 0.33 | 10 | 90 | 30 | -200 | 40 | 90 | CrAlN-DLC 2# | 80 | 40 | 0.5 | 10 | 90 | 30 | -200 | 40 | 90 | CrAlN-DLC 3# | 70 | 50 | 0.71 | 10 | 90 | 30 | -200 | 40 | 90 | CrAlN-DLC 4# | 55 | 65 | 1.18 | 10 | 90 | 30 | -200 | 40 | 90 | CrAlN-DLC 5# | 50 | 70 | 1.4 | 10 | 90 | 30 | -200 | 40 | 90 | CrAlN-DLC 6# | 40 | 80 | 2 | 10 | 90 | 30 | -200 | 40 | 90 |
|
Table 1. Deposition parameters of CrAlN-DLC films
Sample | IC/ICrAl | Thickness/μm |
---|
CrAlN-DLC 1# | 0.33 | (0.99±0.03) | CrAlN-DLC 2# | 0.50 | (1.09±0.02) | CrAlN-DLC 3# | 0.71 | (1.09±0.02) | CrAlN-DLC 4# | 1.18 | (1.08±0.01) | CrAlN-DLC 5# | 1.40 | (1.02±0.02) | CrAlN-DLC 6# | 2.00 | (1.04±0.02) |
|
Table 2. Thickness of CrAlN-DLC films with different arc current ratios
Area
Sample
| C1s | Cr2p | Al2p | N1s |
---|
C-Cr | C-C | C-O | Cr-N | Cr-C | Cr-O | Cr-Cr | Al-N | Al-O | Al-Al | Cr | N-Al |
---|
sp2 | sp3 | (Cr29Al25.1N12.8)-C33.1 | 18.9 | 42.3 | 33.8 | 5.0 | 40.5 | 32.8 | 6.2 | 20.5 | 64.5 | 15.5 | 20.0 | 79.4 | 20.6 | (Cr24.7Al21.9N13.7)-C39.7 | 15.4 | 43.3 | 36.0 | 5.3 | 42.6 | 35.5 | 6.9 | 16.0 | 70.9 | 14.8 | 14.3 | 73.9 | 26.1 | (Cr18.9Al17N15)-C49.1 | 12.5 | 42.6 | 38.0 | 6.8 | 44.2 | 35.4 | 6.3 | 14.1 | 76.2 | 13.0 | 10.8 | 67.4 | 32.6 | (Cr15.3Al14.4N16.2)-C53.9 | 9.8 | 42.7 | 40.0 | 7.5 | 47.7 | 34.6 | 6.1 | 11.6 | 78.3 | 14.2 | 7.5 | 62.8 | 37.2 | (Cr12.4Al11.1N6.2)-C70.3 | 7.5 | 41.4 | 42.3 | 8.7 | 40.4 | 36.0 | 7.3 | 18.3 | 63.8 | 17.9 | 18.6 | 59.2 | 40.8 | (Cr9.5Al8.5N7.4)-C74.6 | 4.3 | 39.0 | 47.0 | 10.0 | 45.0 | 31.6 | 7.7 | 15.7 | 71.7 | 17.3 | 11.0 | 55.5 | 44.5 |
|
Table 3. Fitting results of C1s, Cr2p, Al2p and N1s XPS peak of CrAlN-DLC films (atomic percentage/%)