The research progress of femtosecond laser microstructuring silicon surfaces is summarized. The formation mechanism of the deep subwavelength structure of silicon surfaces induced by ultrashort pulse is introduced, the influence factors of the preparation of micro-nano structures with femtosecond laser irradiating silicon surfaces and the luminescence properties of the micro-nano structures are discussed. The biological bionic characteristics of the micro-nano structures of silicon surfaces induced by femtosecond laser are introduced. The widespread application prospects of femtosecond laser in the preparation of the microstructures are put forward.