Influence of manufacturing errors of micro lens array on optical imaging performance is discussed to quest what distributive surface errors may benefit the improvement of optical performance. Transformation matrix between surface error and corresponding wavefront aberration is established, which achieves high deviation accuracy between simulated and computed wavefront aberrations. Zernike polynomials with orthogonality are utilized as the interface between optics and manufacturing, representing the surface error and wavefront aberration of the finished optical surface with the slow slide servo, acting as the interferogram data imported into the designated surface of 7 sub eye optical system afterwards, thus reflecting the change of distortion, spot diagram, point spread function (PSF) and modulation transfer function (MTF) at different locations quantitatively. Results show that errors with the same distribution but gradually increasing peak-valley (PV) values make the distortion and MTF change with gradient, and two-dimensional distribution of PSF has a remarkable correspondence with field; left and middle distributive wavefront aberrations with the same PV value improve the distortion, spot diagram and MTF at specific relative locations, but worsen optical performance at other locations. With overall consideration of various optical parameters, right distributive surface error benefits the improvement of optical performance, which provides surface shape compensation model for ultra-precision manufacturing process of freeform optics.