Structure simulation for series RF MEMS switch

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Journals >Opto-Electronic Engineering >Volume 32 >Issue 9 >Page 92 > Article

Opto-Electronic Engineering
Vol. 32, Issue 9, 92 (2005)

Structure simulation for series RF MEMS switch

[in Chinese]^1、2, [in Chinese]¹, [in Chinese]¹, [in Chinese]¹, [in Chinese]³, and [in Chinese]³

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¹[in Chinese]

²[in Chinese]

³[in Chinese]

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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Structure simulation for series RF MEMS switch[J]. Opto-Electronic Engineering, 2005, 32(9): 92 Copy Citation Text

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References

[1] J Jason Yao. RF MEMS from a device perspective[J]. Micromechanics & Microengineering,2000,10(4):R9-R38.

[2] SADLER D J,GUPTA S,AHN CH. Micromachined spiral inductors using UV-LIGA techniques [J]. IEEE Transactions on Magnetics,2001,37(4):2897-2899.

[3] MULDAVIN J B,REBEIZ G M. All-metal high-isolation series and series shunt MEMS switches[J]. IEEE microwave & wireless components letters,2001,11(9):373-375.

[4] YAO Z J,CHEN S,ESHELMAN S,et al. Micromachined low-loss microwave switches[J]. IEEE Journal of Microelectromechanical Systems,1999,8(2):129-134.

[5] REBEIZ GM,MULDAVIN J B. RF MEMS switch and switch circuits,and phase shifters[J]. IEEE microwave magazine,2001,2(2):39-71.

[7] YAO J J,CHANG M F. A Surface Micromachined Miniature Switch For Telecommunications Applications With Signal Frequencies From DC Up To 4 Ghz[A]. The 8th International Conference on Solid-state Sensors and Actuators,and Eurosensors IX[C]. Stockholm,Sweden:IEEE,1995,2:384-387.

[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Structure simulation for series RF MEMS switch[J]. Opto-Electronic Engineering, 2005, 32(9): 92

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