• Laser & Optoelectronics Progress
  • Vol. 58, Issue 13, 1306005 (2021)
Changrui Liao1、2, Bozhe Li1、2, Mengqiang Zou1、2, Cong Xiong1、2, Meng Zhu1、2, Jian Yu1、2, Chi Li1、2, and Yiping Wang1、2、*
Author Affiliations
  • 1Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education/Guangdong Province, College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen , Guangdong 518060, China
  • 2Shenzhen Key Laboratory of Photonic Devices and Sensing Systems for Internet of Things, Guangdong and Hong Kong Joint Research Centre for Optical Fibre Sensors, Shenzhen University, Shenzhen , Guangdong 518060, China
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    DOI: 10.3788/LOP202158.1306005 Cite this Article Set citation alerts
    Changrui Liao, Bozhe Li, Mengqiang Zou, Cong Xiong, Meng Zhu, Jian Yu, Chi Li, Yiping Wang. Optical Fiber Integrated Micro/Nano-Structured Device Fabricated by Femtosecond Laser Induced Two-Photon Polymerization and Its Applications[J]. Laser & Optoelectronics Progress, 2021, 58(13): 1306005 Copy Citation Text show less
    Processing diagram of femtosecond laser-induced two-photon polymerization process. (a) Optical path diagram of femtosecond laser micromachining system[35]; (b) methods of fixing micro/nano-fibers in the process of two-photon polymerization[35]; (c) polymer Bragg grating diagram[35]; (d) welding process[36]; (e) ablation process[36]; (f) polymerization process[36]; (g) development process[36]
    Fig. 1. Processing diagram of femtosecond laser-induced two-photon polymerization process. (a) Optical path diagram of femtosecond laser micromachining system[35]; (b) methods of fixing micro/nano-fibers in the process of two-photon polymerization[35]; (c) polymer Bragg grating diagram[35]; (d) welding process[36]; (e) ablation process[36]; (f) polymerization process[36]; (g) development process[36]
    Various optical integrated waveguide devices fabricated by two-photon polymerization. (a) Linear polymer FBG integrated on microfiber surface [35]; (b) helical FBG integrated on microfiber surface[39]; (c) polymer waveguide FBG integrated in hollow fiber[40]; (d) polymer waveguide interferometer integrated in hollow fiber[41]; (e) all-optical modulator based on a polymer FBG integrated in hollow fiber[36]
    Fig. 2. Various optical integrated waveguide devices fabricated by two-photon polymerization. (a) Linear polymer FBG integrated on microfiber surface [35]; (b) helical FBG integrated on microfiber surface[39]; (c) polymer waveguide FBG integrated in hollow fiber[40]; (d) polymer waveguide interferometer integrated in hollow fiber[41]; (e) all-optical modulator based on a polymer FBG integrated in hollow fiber[36]
    Hydrogen sensor based on fiber end polymer μ-cantilever[42]. (a) Schematic diagram; (b) reflection spectra of μ-cantilever beams at different heights; (c) scanning electron microscopy image of the polymer μ-cantilever
    Fig. 3. Hydrogen sensor based on fiber end polymer μ-cantilever[42]. (a) Schematic diagram; (b) reflection spectra of μ-cantilever beams at different heights; (c) scanning electron microscopy image of the polymer μ-cantilever
    Fabrication process of the polymer μ-cantilever hydrogen sensor. (a) Modeling; (b) model slicing and scanning path design; (c) polymerization; (d) developing; (e) palladium film coating; (f) finished product
    Fig. 4. Fabrication process of the polymer μ-cantilever hydrogen sensor. (a) Modeling; (b) model slicing and scanning path design; (c) polymerization; (d) developing; (e) palladium film coating; (f) finished product
    SZP structure of optical fiber end face prepared by two-photon polymerization method[55]
    Fig. 5. SZP structure of optical fiber end face prepared by two-photon polymerization method[55]
    Optical path diagram of the optical fiber end face written by the SZP microstructure[57]
    Fig. 6. Optical path diagram of the optical fiber end face written by the SZP microstructure[57]
    Fiber end face SZP structure[57]
    Fig. 7. Fiber end face SZP structure[57]
    Kinoform SZP of fiber end face prepared by two-photon polymerization[58]. (a) Structure design; (b) l=-1; (c) l=0; (d) l=1; (e) l=2
    Fig. 8. Kinoform SZP of fiber end face prepared by two-photon polymerization[58]. (a) Structure design; (b) l=-1; (c) l=0; (d) l=1; (e) l=2
    Changrui Liao, Bozhe Li, Mengqiang Zou, Cong Xiong, Meng Zhu, Jian Yu, Chi Li, Yiping Wang. Optical Fiber Integrated Micro/Nano-Structured Device Fabricated by Femtosecond Laser Induced Two-Photon Polymerization and Its Applications[J]. Laser & Optoelectronics Progress, 2021, 58(13): 1306005
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