Emission Spectroscopy Diagnosis and Simulation Study of Argon Pressure Effect on Helicon Wave Discharge

DUAN Peng-zhen; LI Yi-wen; ZHANG Bai-ling; WEI Xiao-long; CHANG Lei; ZHAO Wei-zhuo

doi:10.3964/j.issn.1000-0593(2019)08-2341-07

Journals >Spectroscopy and Spectral Analysis >Volume 39 >Issue 8 >Page 2341 > Article

Spectroscopy and Spectral Analysis
Vol. 39, Issue 8, 2341 (2019)

Emission Spectroscopy Diagnosis and Simulation Study of Argon Pressure Effect on Helicon Wave Discharge

DUAN Peng-zhen^1、2、*, LI Yi-wen¹, ZHANG Bai-ling¹, WEI Xiao-long¹, CHANG Lei³, and ZHAO Wei-zhuo¹

Author Affiliations

¹[in Chinese]

²[in Chinese]

³[in Chinese]

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DOI: 10.3964/j.issn.1000-0593(2019)08-2341-07 Cite this Article

DUAN Peng-zhen, LI Yi-wen, ZHANG Bai-ling, WEI Xiao-long, CHANG Lei, ZHAO Wei-zhuo. Emission Spectroscopy Diagnosis and Simulation Study of Argon Pressure Effect on Helicon Wave Discharge[J]. Spectroscopy and Spectral Analysis, 2019, 39(8): 2341 Copy Citation Text

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References

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