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    Journals >Opto-Electronic Engineering >Volume 31 >Issue 8 >Page 12 > Article
    • Opto-Electronic Engineering
    • Vol. 31, Issue 8, 12 (2004)
    The bonding process for a novel micro-deformable mirror
    [in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]2, and [in Chinese]2
    Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: Cite this Article
    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. The bonding process for a novel micro-deformable mirror[J]. Opto-Electronic Engineering, 2004, 31(8): 12 Copy Citation Text show less
    References

    [1] TYSON R. Principles of Adaptive Optics: 2nd ed[M]. New York: Academic Press, 1998.

    [3] THORBURN W, KAPLAN L. A low voltage electro-distortive mirror system for wavefront- control, Active and Adaptive Optical Components[J]. SPIE, 1991,1543: 52-58.

    [5] MADOU M. Fundamentals of microfabrication: the science of miniaturization: 2nd ed[M]. Boca Raton, Fla.: CRC Press, 2002.

    [6] VDOVIN G, MIDDELHOEK S, SARRO P. Technology and applications of micromachined adaptive mirrors[J]. J. Micromech. Microeng, 1999, 9(5): 8-19.

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. The bonding process for a novel micro-deformable mirror[J]. Opto-Electronic Engineering, 2004, 31(8): 12
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