The bonding process for a novel micro-deformable mirror

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Journals >Opto-Electronic Engineering >Volume 31 >Issue 8 >Page 12 > Article

Opto-Electronic Engineering
Vol. 31, Issue 8, 12 (2004)

The bonding process for a novel micro-deformable mirror

[in Chinese]¹, [in Chinese]¹, [in Chinese]¹, [in Chinese]¹, [in Chinese]², and [in Chinese]²

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¹[in Chinese]

²[in Chinese]

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DOI: Cite this Article

[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. The bonding process for a novel micro-deformable mirror[J]. Opto-Electronic Engineering, 2004, 31(8): 12 Copy Citation Text

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Abstract

[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. The bonding process for a novel micro-deformable mirror[J]. Opto-Electronic Engineering, 2004, 31(8): 12

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