[1] T. Matsuyama, Y. Ohmura, D. M. Williamson. The lithographic lens: its history and evolution[C]. SPIE, 2006, 6154: 615403
[2] G. E. Sonmmargren, D. W. Phillion, M. A. Johnson et al.. 100-picometer interferometer for EUVL [C]. SPIE, 2002, 4688: 316~328
[3] D. Bernd, S. Günther. Interferometric testing of optical surfaces of its current limit [J]. Int. J. Light & Electron. Opt., 2001, 112(9): 392~398
[4] Oliver P. Lay. Systematic errors in nulling interferometers [J]. Appl. Opt., 2004, 43(33): 6100~6123
[5] J. Schwider, R. Burow, K. E. Elssner et al.. Digital wavefront measuring interferometry: some systematic error sources [J]. Appl. Opt., 1983, 22(21): 3421~3432
[6] Vincenzo Greco, Giuseppe Molesini. Micro-temperature effects on absolute flatness test plates [J]. Pure & Appl. Opt., 1998, 7(6): 1341~1346
[7] J. E. Millerd, N. J. Brock, J. B. Hayes et al.. Instantaneous phase-shift, point-diffraction interferometer [C]. SPIE, 2004, 5531: 264~272
[8] R. Wilhelm, B. Luong, A. Courteville et al.. Dual-wavelength low-coherence instantaneous phase-shifting interferometer to measure the shape of a segmented mirror with subnanometer precision [J]. Appl. Opt., 2008, 47(29): 5473~5491
[9] B. Edlen. The refractive index of air [J]. Metrologia, 1966, 2(2): 71~80
[10] K.P. Brich, M. J. Downs. Correction to the updated Edlen equation for the refractive index of air [J]. Metrologia, 1994, 31(4): 315~316
[11] P. Hariharan. Interferometric testing of optical surfaces: absolute measurement of flatness [J]. Opt. Engng., 1997, 36(9): 2478~2481
[12] F. Bozenko, I. David, J. Christopher et al.. Calibration of a 300-mm-aperture phase-shifting Fizeau interferometer [J]. Appl. Opt., 2000, 39(28): 5161~5171
[13] D. Malacara. Phase Shifting Interferometery, in Optical Shop Testing [M]. New York: Wiley, 2007. 547~655