• Laser & Optoelectronics Progress
  • Vol. 50, Issue 11, 111402 (2013)
Kong Lingrui*, Zhang Fei, Duan Jun, and Zeng Xiaoyan
Author Affiliations
  • [in Chinese]
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    DOI: 10.3788/lop50.111402 Cite this Article Set citation alerts
    Kong Lingrui, Zhang Fei, Duan Jun, Zeng Xiaoyan. Research on Etching of Quartz Ceramic by Laser Beam[J]. Laser & Optoelectronics Progress, 2013, 50(11): 111402 Copy Citation Text show less
    References

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    [4] Luo zhihai, Yang Runze. Present condition & developments of machining technologies for engineering ceramics[J]. Ceramics, 2010, (10): 7-10.

    [5] Liu Kui, Feng Guoying, Deng Guoliang, et al.. Difference in microstructures induced by femtosecond laser scanning on silicon surface at different temperatures[J]. Chinese J Lasers, 2012, 39(8): 0803003.

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    [8] Fei Zhang, Jun Duan, Xiaoyan Zeng, et al.. UV laser microprocessing and post chemical etching on ultrathin Al2O3 ceramic substrate[J]. J European Ceramic Society, 2011, 31(9): 1631-1639.

    [9] Wang Xiaofeng, Zhu Aiju, Ding Tongmei, et al.. Computer simulation of surface roughness of quartz ceramic etching with diamond[J]. Superhard Material Engineering, 2006, 18(6): 5-8.

    [10] Chen Jun. Research on Absorptivity of Laser During Laser Treatments [D]. Hangzhou: Zhejaing University of Technology, 2008.

    [11] J H Bronnon, J R Lankard, et al.. Excimer laser etching of polyimide[J]. Appl Phys,1985, 58(5): 2036-2043.

    [12] Xiang Shibiao. Principle and Practice of Laser Ignition[M]. Xi′an: The Yellow River Water Conservancy Press, 2004. 23-24.

    Kong Lingrui, Zhang Fei, Duan Jun, Zeng Xiaoyan. Research on Etching of Quartz Ceramic by Laser Beam[J]. Laser & Optoelectronics Progress, 2013, 50(11): 111402
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