CHARACTERIZATION OF UNCOOLED VO2-BASED THIN FILMS BOLOMETER CHEN Chang-Hong（Department of Optoelectronic

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Journals >Journal of Infrared and Millimeter Waves >Volume 20 >Issue 2 >Page 136 > Article

Journal of Infrared and Millimeter Waves
Vol. 20, Issue 2, 136 (2001)

CHARACTERIZATION OF UNCOOLED VO₂-BASED THIN FILMS BOLOMETER CHEN Chang-Hong（Department of Optoelectronic

[in Chinese], [in Chinese], [in Chinese], and [in Chinese]

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[in Chinese]

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DOI: Cite this Article

[in Chinese], [in Chinese], [in Chinese], [in Chinese]. CHARACTERIZATION OF UNCOOLED VO₂-BASED THIN FILMS BOLOMETER CHEN Chang-Hong（Department of Optoelectronic[J]. Journal of Infrared and Millimeter Waves, 2001, 20(2): 136 Copy Citation Text

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Abstract

An uncooled bolometer based on VO₂ thin films deposited by reactive ion-beam sputtering was fabricated. The noise and responsivity for the spectral range 8-12μm were measured at 296K. At the chopper frequency of 30Hz, the device having a detectivity D^* of 1.89×10⁸cmHz^1/2W^-1and a thermal time constant of 0.011s was realized.

Keywords

detectivity infrared responsivity.vanadium dioxide bolometer

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