[1] Amantea R,Knoedler C M,Pantuso F P.et al.An uncooled IR imaging with 5mk NEDT[ J].SPIE,1997,3061:210-222.
[2] Zhao yang,Mingyao mao,Roberto Horowetz.et al.Optomechanical uncooled infrared imaging system:desing,microfabrication,and performance [J].IEEE,2002,11:136-146.
[3] Amantea R,Goodman L A,Pantuso F.et al.Progress towards an Uncooled IR Imager With 5 mk NEDT[J].SPIE,1998,3436:647-659.
[6] Gregory T,Kovacs A.Micromachined Transducers Sourcebook.[ M ].Beijing:Science Press,2003:57.
[7] G.Datskos P,Rsjic S.Fabrication of quantum well microcantilever photon detectors [ J ].Ultramicroscopy,2001,86:191-206.
