Improved Genetic Algorithm Inverted with Optical Constants of Diamond-Like Carbon Film

Li Jianchao; Su Junhong; Xu Junqi

doi:10.3788/lop48.031201

[1] Liao Naiman, Li wei. Thickness and optical constant determination of hydrogenated amorphous silicon thin film from transmittance spectra of ellipsometer［J］. Acta Physica Sinica, 2008, 57(3): 1542～1547

[2] Zhou Yi, Wu Guosong. Accurate determination of optical constants and thickness of absorbing thin films by a combined ellipsometry and spectro-photometry approach［J］. Acta Physica Sinica, 2010, 59(4): 2356～2363

[3] Wang Xiaodong, Shen Jun. Optical constants of sol-gel derived TiO2 films characterized by spectroscopic ellipsometry［J］. Acta Physica Sinica, 2009, 58(11): 8027～8032

[4] Wang Dangshe. Inversion and Measurement of Optical Parameter of DLC Film［D］. Xi′an: Xidian University, 2006

[5] Liao Qingjun, Wang Zhiheng, Wanglei. Ellipsometric data inversion of absorbing films by simulated annealing［J］. Acta Optica Sinica, 2002, 22(6): 683～687

[6] Yang Shenghong, Yu Zhaoxian, Li Huiqiu. Simulated annealing optimization algorithm for inverting ellipsometric spectr［J］. Journal of Infrared and Millimeter Waves, 2000, 19(5): 338～342

[7] Chemishkian S., Arabyan A.. Intelligent algorithms for optimal placement of actuators and sensors in structural control［C］. American Control Conference. IEEE Piscataway, 1999, 3: 1812～1816

[8] S. Martin, J. Rivory, M. Schoenauer. Synthesis of optical multilayer systems using genetic algorithms［J］. Appl. Opt., 1995, 34(13): 2247～2254

[9] Wang Qiang, Shen Guotu, Yang Baocheng et al.. Application of genetic algorithm in the design optimization of grating profile［J］. Infrared and Laser Engineering, 2005, 34(4): 410～414

[10] Goldberg D. E.. Genetic Algorithms in Search, Optimization and Machine Learning［M］. Massadusetts: Addison-Wesley Professional, 1989. 1～83

[11] LI Ming. The Study on Improved Genetic Algorithm and Its Application in Optimization Questions［D］. Jilin: Jilin University, 2004

[12] Cao Daoyou, Cheng Jiaxing. A genetic algorithm based on modified selection operator and crossover operator［J］. Computer Technology and Development, 2010, 20(2): 44～51

[13] Born M., Wolf E.. Principles of Optics［M］. New York: Oxford,1989