A XeCl ezcimer laser with automatic preionization

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Journals >Chinese Journal of Lasers >Volume 14 >Issue 1 >Page 57 > Article

Chinese Journal of Lasers
Vol. 14, Issue 1, 57 (1987)

A XeCl ezcimer laser with automatic preionization

[in Chinese]¹, [in Chinese]¹, [in Chinese]², [in Chinese]², [in Chinese]², [in Chinese]², [in Chinese]², [in Chinese]², and [in Chinese]²

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¹[in Chinese]

²[in Chinese]

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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. A XeCl ezcimer laser with automatic preionization[J]. Chinese Journal of Lasers, 1987, 14(1): 57 Copy Citation Text

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Abstract

The effects of some parameters in XeCl excimer laser with automatic preioniza-tion on the laser output are described. The maximum output energy of 120 mJ per pulse has been obtained when the ratio of storage capacitor Cs and peaking capacitor Op is equal to 2.

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