Yiwen Wang, Qiushi Huang, Qiang Yi, Li Jiang, Zhong Zhang, Zhanshan Wang. Design of Pd/B4C aperiodic multilayers for 8–12 nm region with flat reflectivity profile[J]. Chinese Optics Letters, 2016, 14(7): 073101
- Chinese Optics Letters
- Vol. 14, Issue 7, 073101 (2016)
Fig. 1. Designed reflectivity profiles of aperiodic Pd / B 4 C
Fig. 2. Designed reflectivity profiles of aperiodic Pd / B 4 C
Fig. 3. Reflectivity profile of the aperiodic Pd / B 4 C
Fig. 4. Reflectivity profile of the original aperiodic multilayer optimized with 100% bulk density (solid), the original multilayer calculated with 95% (dash) and 90% bulk density (dash dot), and the multilayer optimized with 90% bulk density (dot).
Fig. 5. Reflectivity profiles of the designed aperiodic multilayer with different layer thickness errors. The multilayer is designed for the waveband of 8.5–10.5 nm.
Fig. 6. Layer thickness distribution of the multilayer designed for the waveband of 8.5–10.5 nm (solid) with 120 bilayers, and the multilayer with random errors of ≤ ± 2 %
Fig. 7. Reflectivity profiles of the periodic Pd / B 4 C
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Table 1. Parameters of Optimization and the Resulted Reflectivity Profiles for Aperiodic Multilayers with Different Bandwidths
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