• Chinese Optics Letters
  • Vol. 14, Issue 7, 073101 (2016)
Yiwen Wang1, Qiushi Huang1, Qiang Yi1、2, Li Jiang1, Zhong Zhang1, and Zhanshan Wang1、*
Author Affiliations
  • 1Key Laboratory of Advanced Micro-Structured Materials MOE, Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, Shanghai 200092, China
  • 2Institute of Nuclear Physics and Chemistry CAEP, Mianyang 621900, China
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    DOI: 10.3788/COL201614.073101 Cite this Article Set citation alerts
    Yiwen Wang, Qiushi Huang, Qiang Yi, Li Jiang, Zhong Zhang, Zhanshan Wang. Design of Pd/B4C aperiodic multilayers for 8–12  nm region with flat reflectivity profile[J]. Chinese Optics Letters, 2016, 14(7): 073101 Copy Citation Text show less

    Abstract

    The Pd/B4C multilayer is a promising candidate for high reflectance mirrors operating in the 8–12 nm extreme ultraviolet wavelength region. To extend the working bandwidth beyond the L-edge of silcon, we theoretically design broadband Pd/B4C multilayers. We discuss the influence of the desired reflectance of the plateau, number of bilayers, and the real structural parameters, including the interface widths, layer density, and thickness deviation, on the reflectivity profile. Assuming the interface width to be 0.6 nm, we design aperiodic multilayers for broad wavebands of 9.0–10.0, 8.5–10.5, and 8.0–11.0 nm, with average reflectivities of 3.1%, 5.0%, and 9.5%, respectively.
    MFi=1M[R(i)R0]2,(1)

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    Dstandard=i=1N(RiRaverage)2/N,(2)

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    Yiwen Wang, Qiushi Huang, Qiang Yi, Li Jiang, Zhong Zhang, Zhanshan Wang. Design of Pd/B4C aperiodic multilayers for 8–12  nm region with flat reflectivity profile[J]. Chinese Optics Letters, 2016, 14(7): 073101
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