Development and experiment of online self-calibration system for circular grating angle sensor

Zhang Wenying; Lao Dabao; Zhou Weihu; Zhu Haoran

doi:10.3788/irla201847.0117004

[1] Tsukasa Watanabe, Hiroyuli Fujimoto, Tadashi Masuda, et al. Self-calibratable rotary encoder[J]. Journal of Physics, Conference Series, 2005, 13: 240-245.

[2] Ralf D Geckeler, Alfred Link, Michael Krause, et al. Capabilities and limitations of the self-calibration of angle encoders[J]. Meas Sci Technol, 2014, 25: 1384-1394.

[3] Watanabe T, Fujimoto, Nakayamak, et al. Automatic high precision calibration system for angle encoder[C]//SPIE Recent Developments in Traceable Dimensional Measurement, 2003: 400-409.

[4] Angelika Taubner, Hans-Jurgen von Martens. Measurement of angular accelerations, angular velocities and rotation angles by grating interferometry[J]. Measurement, 1998, 24: 21-32.

[5] Probst R. Self-calibration of divided circles on the basis of prime factor algorithm[J]. Measurement Science and Technology, 2008, 19: 1-11.

[6] Ralf D Geckeler, Andreas Fricke, Clemens Elster. Calibration of angle encoders using transfer functions [J]. Measurement and Science Technology, 2006, 17: 2811-2818.

[7] Just A, Krause M, Probst R, et al. Calibration of high-resolution electronic autocollimators against an angle comparator[J]. Metrologia, 2003, 40: 288.

[8] Wang Xianjun. Reflection photoelectric encoder[J]. Optics and Precision Engineering, 2013, 12(24): 3066-3071.

[9] Jong Ahn Kim, Jae Wan Kim, Chu Shik Kang, et al. Precision angle comparator using self-calibration of scale errors based on the equal-division-averaged method[J]. Macro Scale Proceedings, 2011, 24(9): 389-397.

[10] Dong Dengfeng, Zhou Weihu, Ji Rongyi, et al. Design of precise tracking system of laser tracker[J]. Optics and Precision Engineering, 2016, 2(24): 309-3018. (in Chinese)

[11] Guo Jingbin, Cao Hongyan, Wang Kexin, et al. Study on verification and compensation of indexing errors for turntable[J]. China Mechanical Engineering, 2014, 25(7): 895-899. (in Chinese)

[12] Orton P A, Poliakoff J F, Hatiris E, et al. Automatic self-calibration of an incremental motion encoder[C]//IEEE Instrumentation and Measurement Technology Conference,2001: 1614-1618.