• Microelectronics
  • Vol. 53, Issue 2, 310 (2023)
ZHANG Shunyi, JI Xincun, and WANG Debo
Author Affiliations
  • [in Chinese]
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    DOI: 10.13911/j.cnki.1004-3365.220425 Cite this Article
    ZHANG Shunyi, JI Xincun, WANG Debo. Study on a High Performance Laser Induced Graphene Pressure Sensor[J]. Microelectronics, 2023, 53(2): 310 Copy Citation Text show less

    Abstract

    In order to improve the performance of laser-induced graphene pressure sensors under the premise of low cost and easy preparation, an amplification structure of graphene pressure sensor was designed. The surface structure of laser-induced graphene pressure sensor was characterized, and the influence of the surface porous foam structure on the piezoresistive effect was analyzed. COMSOL software was used to simulate and analyze the stress of the sensor amplification structure, and the stress of graphene layer under external pressure was obtained. The amplification substrate was 3D printed with the resin material, which took into account the properties of light weight, high precision, and high mechanical strength at low cost. The tested results show that when the pressure is in the range of 5-20 kPa, the sensitivity of the amplified structure is increased by about 43% compared with that of the non-amplified structure.
    ZHANG Shunyi, JI Xincun, WANG Debo. Study on a High Performance Laser Induced Graphene Pressure Sensor[J]. Microelectronics, 2023, 53(2): 310
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