• Acta Optica Sinica
  • Vol. 27, Issue 6, 1027 (2007)
[in Chinese]1、*, [in Chinese]1, [in Chinese]2, [in Chinese]1, and [in Chinese]1
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  • 1[in Chinese]
  • 2[in Chinese]
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Method to Reduce First Harmonic Nonlinearity in Laser Heterodyne Interferometry[J]. Acta Optica Sinica, 2007, 27(6): 1027 Copy Citation Text show less
    References

    [1] Mark L. Schattenburg, Henry I. Smith. The critical role of metrology in nanotechnology[C]. Proc. SPIE, 2002, 4608: 116~124

    [3] Wenmei Hou, Günter Wilkening. Investigation and compensation of the nonlinearity of heterodyne interferometers[J]. Precision Engng., 1992, 14(2): 91~98

    [4] V. G. Badami, S. R. Patterson. A frequency domain method for the measurement of nonlinearity in heterodyne interferometry[J]. Precision Engng., 2000, 24(1): 41~49

    [5] Tae Bong Eom, Tae Young Choi, Keon Hee Lee et al.. A simple method for the compensation of the nonlinearity in the heterodyne interferometer[J]. Meas. Sci. Technol., 2002, 13: 222~225

    [9] B. C. Park, T. B. Eom, M. S. Chung. Polarization properties of cube-corner retroreflectors and their effects on signal strength and nonlinearity in heterodyne interferometers[J]. Appl. Opt., 1996, 35(22): 4372~4380

    [10] Jian Liu, R. M. A. Azzam. Polarization properties of corner-cube retroreflectors: theory and experiment[J]. Appl. Opt., 1997, 36(7): 1553~1559

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    [1] Liu Binbin, Yuan Yonggui, Wang Xinxing, Huang Fengzhen, Yang Jun, Yuan Libo. RealTime Nonlinearity Error Correction Method of Polarizing Laser Interferometer[J]. Acta Optica Sinica, 2010, 30(9): 2585

    [2] Zhou Hui, Li Song, Zheng Guoxing, Gao Junling. Influence of Satellite Retroreflector Precision on Far-Field Diffraction Pattern[J]. Acta Optica Sinica, 2009, 29(1): 60

    [3] Huang Qianghui, Cao Yiping. New Method for Detecting Orthogonal Signals of Laser Interference Fringes Using Four-Quadrant Detector[J]. Chinese Journal of Lasers, 2009, 36(5): 1166

    [4] Yang Licheng, Ling Ning. Analysis on Wavefront Errors of Active Deformable Mirror[J]. Acta Optica Sinica, 2009, 29(3): 569

    [5] Le Yanfen, Ju Aisong. Analysis and Measurement of the Nonlinear Errors in Heterodyne Interferometers[J]. Laser & Optoelectronics Progress, 2016, 53(5): 51203

    [6] Deng Yuanlong, Li Yuezhi, Wu Yubin, Xu Gang. Influence of Metal-Coated Mirrors on Measurement Accuracy in Heterodyne Interferometric Ellipsometry[J]. Chinese Journal of Lasers, 2009, 36(2): 439

    [7] Deng Yuanlong, Li Xuejin, Chai Jinlong, Xu Gang. Nonlinear Error Introduced by Beam Splitters in an Interferometric Ellipsometer[J]. Chinese Journal of Lasers, 2008, 35(s2): 137

    [8] Deng Yuanlong, Li Xuejin, Geng Youfu, Hong Xueming. Influence of Nonpolarizing Beam Splitters on Nonlinear Error in Heterodyne Interferometers[J]. Acta Optica Sinica, 2012, 32(11): 1112008

    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Method to Reduce First Harmonic Nonlinearity in Laser Heterodyne Interferometry[J]. Acta Optica Sinica, 2007, 27(6): 1027
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