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    Journals >Acta Optica Sinica >Volume 35 >Issue 4 >Page 422002 > Article
    • Acta Optica Sinica
    • Vol. 35, Issue 4, 422002 (2015)
    Source Optimization Using Particle Swarm Optimization Algorithm in Optical Lithography
    Wang Lei1、2、*, Li Sikun1, Wang Xiangzhao1、2, Yan Guanyong1、2, and Yang Chaoxing1、2
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  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.3788/aos201535.0422002 Cite this Article Set citation alerts
    Wang Lei, Li Sikun, Wang Xiangzhao, Yan Guanyong, Yang Chaoxing. Source Optimization Using Particle Swarm Optimization Algorithm in Optical Lithography[J]. Acta Optica Sinica, 2015, 35(4): 422002 Copy Citation Text show less
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    Article index updated: May. 27, 2024
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    Wang Lei, Li Sikun, Wang Xiangzhao, Yan Guanyong, Yang Chaoxing. Source Optimization Using Particle Swarm Optimization Algorithm in Optical Lithography[J]. Acta Optica Sinica, 2015, 35(4): 422002
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