• Journal of Infrared and Millimeter Waves
  • Vol. 39, Issue 1, 56 (2020)
Tong FANG1、3, Li-Yuan LIU1、3、*, Zhao-Yang LIU1、3, Peng FENG1、3, Yuan-Yuan LI2、3, Jun-Qi LIU2、3, Jian LIU1、3, and Nan-Jian WU1、3
Author Affiliations
  • 1State Key Laboratory of Superlattices and Microstructures, Institute of Semiconductors, Chinese Academy of Sciences, Beijing00083, China
  • 2Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing100083, China
  • 3Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing100049, China
  • show less
    DOI: 10.11972/j.issn.1001-9014.2020.01.009 Cite this Article
    Tong FANG, Li-Yuan LIU, Zhao-Yang LIU, Peng FENG, Yuan-Yuan LI, Jun-Qi LIU, Jian LIU, Nan-Jian WU. A 3.0 THz detector in 65 nm standard CMOS process[J]. Journal of Infrared and Millimeter Waves, 2020, 39(1): 56 Copy Citation Text show less

    Abstract

    A 3.0 THz detector based on plasma-wave theory proposed by Dyakonov and Shur was designed and fabricated in 65 nm standard CMOS process, the detector consists of a patch antenna, a NMOS field effect transistor, a matching network, and a notch filter. The detector can achieve a room-temperature responsivity (Rv) of 526 V/W and a noise equivalent power (NEP) of 73 pW/Hz1/2. The terahertz scanning imaging system was built with the detector and stepper motor, and the far-field shape of the terahertz source beam was obtained, the full width at half maximum (FWHM) of the beam is 240 μm; and the image of the polyformaldehyde toothpick and tree leaf were obtained through the scanning imaging system, it shows that CMOS terahertz detectors have potential applications in the imaging field.
    Tong FANG, Li-Yuan LIU, Zhao-Yang LIU, Peng FENG, Yuan-Yuan LI, Jun-Qi LIU, Jian LIU, Nan-Jian WU. A 3.0 THz detector in 65 nm standard CMOS process[J]. Journal of Infrared and Millimeter Waves, 2020, 39(1): 56
    Download Citation