Hongyan JIANG, Bing SUN, Deying CHEN, Yiqin JI, Tianhe WANG, Rongwei FAN. High-precision spectral characteristic measurement and characterization system[J]. Infrared and Laser Engineering, 2024, 53(8): 20240131
- Infrared and Laser Engineering
- Vol. 53, Issue 8, 20240131 (2024)
Fig. 1. Schematic diagram of a beam incident on the surface of a sample
Fig. 2. Research plan for high-precision spectral characterization and testing and characterization
Fig. 3. Optical constants of (a) Ta2O5 and (b) SiO2
Fig. 4. Theoretical design transmittance curve of narrow-band filter
Fig. 5. Schematic diagram of ion beam sputtering deposition
Fig. 6. Multi-temperature step annealing
Fig. 7. High precision spectral characteristic test curve
Fig. 8. High precision spectral characteristic testing at different angles
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Table 1. Processing parameter for preparing Ta2O5 and SiO2 films
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Table 2. High precision spectral characteristic test results
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