[in Chinese], [in Chinese]. Diffraction Technique of Mirror Image and Its Application in Measurement[J]. Acta Optica Sinica, 2001, 21(9): 1103
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Aiming at the improvement of the normal diffraction technique, a kind of new method is presented. The reflection is introduced to form mirror image. By this way, the light intensity distribution of the diffraction fringe can be changed to improve the measuring accuracy, increase the dynamic range, and restrain the degradation of the field distribution caused by the unevenness of the slot. The parameter preferences are discussed.