• Chinese Optics Letters
  • Vol. 23, Issue 4, 043401 (2025)
Dongxu Qin1, Lian Xue2, Yifan Ding1, Ziwen Huang3..., Lei Yang1, Zhaofeng Kang1, Keyi Wang1,* and Shuai Zhao4,**|Show fewer author(s)
Author Affiliations
  • 1Department of Precision Machinery and Precision Instrument, University of Science and Technology of China, Hefei 230026, China
  • 2Shanghai Synchrotron Radiation Facility, Shanghai Advanced Research Institute, Chinese Academy of Sciences, Shanghai 201204, China
  • 3School of Electrical Engineering and Automation, Hefei University of Technology, Hefei 230009, China
  • 4National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230029, China
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    DOI: 10.3788/COL202523.043401 Cite this Article Set citation alerts
    Dongxu Qin, Lian Xue, Yifan Ding, Ziwen Huang, Lei Yang, Zhaofeng Kang, Keyi Wang, Shuai Zhao, "Optical characterization of X-ray polymer refractive lenses using a microfocus X-ray grating interferometer," Chin. Opt. Lett. 23, 043401 (2025) Copy Citation Text show less

    Abstract

    Two-photon polymerization lithography is a technique that provides hundreds of nanometer resolution and full geometric freedom. Several X-ray polymer refractive lenses created by this technique were characterized using differential phase contrast imaging (DPCI) with a microfocus X-ray grating interferometer. The beam deflection angle and wavefront phase shift of the X-ray beam through the lens were obtained. Comparative tests using synchrotron radiation sources showed that the system could measure the surface shape of X-ray refractive lenses with an accuracy of 0.4 µm. This study is important for improving the fabrication process and focusing performance of X-ray refractive lenses.
    αl=λ2πØlxl,

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    f=R2Nδ,

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    dm=mp128λ.

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    Zm=l1l1dmdm,

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    p2*=l1l1dmp12.

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    ΔαPG=λ2πØPGxPG,

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    ØPGxPG=rl1Ølxl,

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    φ=λZmp2*rl1Ølxl.

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    Dongxu Qin, Lian Xue, Yifan Ding, Ziwen Huang, Lei Yang, Zhaofeng Kang, Keyi Wang, Shuai Zhao, "Optical characterization of X-ray polymer refractive lenses using a microfocus X-ray grating interferometer," Chin. Opt. Lett. 23, 043401 (2025)
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