[1] M. G. Krishna, K. N. Rao, and S. Mohan, J. Vac. Sci. Technol. A 10, 3451 (1992).

[2] D. Zhang, M. Zhan, M. Fang, H. He, J. Shao, and Z. Fan, Chin. Opt. Lett. 2, 364 (2004).

[3] G. Laukaitis, J. Dudonis, and D. Milcius, Thin Solid Films 515, 678 (2006).

[4] W. T. Pawlewicz and D. D. Hays, Thin Solid Films 94, 31 (1982).

[5] J. T. Chang, C. H. Yeh, J. L. He, K. C. Chen, A. Matthews, and A. Leyland, Surf. Coat. Technol. 200, 1401 (2005).

[6] S. Sprio, S. Guicciardi, A. Bellosi, and G. Pezzotti, Surf. Coat. Technol. 200, 4579 (2006).

[7] M. Fukutomi, S. Aoki, K. Komori, Y. Tanaka, T. Asano, and H. Maeda, Thin Solid Films 239, 123 (1994).

[8] S. Wu, J. Shao, K. Yi, and Z. Fan, "Y2O3 stabilized ZrO2 vacuum coating material and its preparation" (in Chinese) Chinese Patent CN1696328 (2005).

[9] P. Gao, L. J. Meng, M. P. dos Santos, V. Teixeira, and M. Andritschky, Thin Solid Films 377, 557 (2000).

[10] J. C. Manifacier, J. Gasiot, and J. P. Fillard, J. Phys. E 9, 1002 (1976).

[11] M. Boulouz, L. Martin, A. Boulouz, and A. Boyer, Mater. Sci. Eng. B 67, 122 (1999).

[12] M. Harris, H. A. Macleod, S. Ogura, E. Pelletier, and B. Vidal, Thin Solid Films 57, 173 (1979).

[13] J. Tang, P. Gu, X. Liu, and H. Li, Modern Optical Thin Films Technology (Zhejiang University Press, Hangzhou, 2006) p.244.

[14] J. Ullmann, A. J. Kellock, and J. E. E. Baglin, Thin Solid Films 341, 238 (1999).

[15] E. Klockholm, J. Vac. Sci. Technol. 6, 138 (1968).