Influences of Y2O3 dopant content on residual stress, structure, and optical properties of ZrO2 thin films

Qiling Xiao; Shuying Shao; Jianda Shao; Zhengxiu Fan

doi:10.3788/COL20090702.0162

Journals >Chinese Optics Letters >Volume 7 >Issue 2 >Page 02162 > Article

Chinese Optics Letters
Vol. 7, Issue 2, 02162 (2009)

Influences of Y2O3 dopant content on residual stress, structure, and optical properties of ZrO2 thin films

Qiling Xiao, Shuying Shao, Jianda Shao, and Zhengxiu Fan

Author Affiliations

R and D Center for Optical Thin Film Coatings, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 2018002 Graduate University of Chinese Academy of Sciences, Beijing 100049

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DOI: 10.3788/COL20090702.0162 Cite this Article Set citation alerts

Qiling Xiao, Shuying Shao, Jianda Shao, Zhengxiu Fan. Influences of Y2O3 dopant content on residual stress, structure, and optical properties of ZrO2 thin films[J]. Chinese Optics Letters, 2009, 7(2): 02162 Copy Citation Text

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