Mandan Luo, Qing Yang, Lingyu Huang, Funing Dong. Non-Contact Current Sensor Based on Micro-Ring Resonator[J]. Acta Optica Sinica, 2021, 41(12): 1228001
- Acta Optica Sinica
- Vol. 41, Issue 12, 1228001 (2021)
Fig. 1. Schematic diagram of the structure of silicon-based micro-ring current sensor
Fig. 2. Simulation models and transmission spectrum of micro-ring resonator. (a)(b) Simulation models; (c) transmission spectrum
Fig. 3. Change of FSR and quality factor with the radius of micro-ring
Fig. 4. SEM of the micro-ring resonators with three radii and the grating coupler. (a) Silicon based micro-ring resonator with radius of 5 μm; (b) silicon based micro-ring resonator with radius of 10 μm; (c) silicon based micro-ring resonator with radius of 15 μm; (d) grating coupler
Fig. 5. A micrograph of the micro-ring resonator coated with Fe3O4 magnetic nanoparticles
Fig. 6. Schematic diagram of test system structure
Fig. 7. Transmission spectra of sensors with different radii. (a) Radius of 5 μm; (b) radius of 10 μm; (c) radius of 15 μm
Fig. 8. Change of the response spectra of the sensor with the current amplitude when the radius is 5 μm
Fig. 9. Variation of resonance wavelength drift with square of current amplitude and its linear fitting under different radii
Fig. 10. Variation of resonance wavelength drift with square of current frequency and its linear fitting under different radii
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