Research of Algorithms to Correct the Random Drifts of Laser Beams

ZHANG Li-xia; LIN Wu-mei; LIAO Zhi-jie; WANG Rui-lin

doi:10.3969/j.issn.1003-501x.2011.12.022

Journals >Opto-Electronic Engineering >Volume 38 >Issue 12 >Page 115 > Article

Opto-Electronic Engineering
Vol. 38, Issue 12, 115 (2011)

Research of Algorithms to Correct the Random Drifts of Laser Beams

ZHANG Li-xia^1、2、*, LIN Wu-mei¹, LIAO Zhi-jie¹, and WANG Rui-lin^1、2

Author Affiliations

¹[in Chinese]

²[in Chinese]

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DOI: 10.3969/j.issn.1003-501x.2011.12.022 Cite this Article

ZHANG Li-xia, LIN Wu-mei, LIAO Zhi-jie, WANG Rui-lin. Research of Algorithms to Correct the Random Drifts of Laser Beams[J]. Opto-Electronic Engineering, 2011, 38(12): 115 Copy Citation Text

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References

[4] Dirk Basting, Gerd Marowsky. Excimer Laser Technology [M]. 2005.

[5] Leonard Lublin, David Warkentin, Palash P Das, et al. High-Performance beam stabilization for next-generation ArF beam delivery systems [J]. SPIE(S0277-786X), 2003, 5040(2003): 1682-1693.

[6] Cymer, Inc. Illumination apparatus and method for controlling energy of a laser source: US, 2009/0201955 Al [P]. 2008-02-07.

[7] Das Palash P, Webb R Kyle, Glowanardl Marco, et al. Lithography laser with beam delivery and beam pointing control [P]. US2004/0022291A. 2003-4-29.

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ZHANG Li-xia, LIN Wu-mei, LIAO Zhi-jie, WANG Rui-lin. Research of Algorithms to Correct the Random Drifts of Laser Beams[J]. Opto-Electronic Engineering, 2011, 38(12): 115

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