• Photonics Research
  • Vol. 13, Issue 6, 1497 (2025)
Naiquan Yan1,2,†, Feng Shi3,†, Xiaomeng Xue1,†, Kenan Zhang2..., Cheng Huo1,2 and Menglu Chen1,2,4,5,*|Show fewer author(s)
Author Affiliations
  • 1School of Optics and Photonics, Beijing Institute of Technology, Beijing 100081, China
  • 2Zhejiang Key Laboratory of 3D Micro/Nano Fabrication and Characterization, Westlake Institute for Optoelectronics, Hangzhou 311421, China
  • 3Laboratory of Science and Technology on Integrated Logistics Support, Changsha 410073, China
  • 4State Key Laboratory of Materials for Integrated Circuits, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
  • 5National Key Laboratory on Near-Surface Detection, Beijing 100012, China
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    DOI: 10.1364/PRJ.546383 Cite this Article Set citation alerts
    Naiquan Yan, Feng Shi, Xiaomeng Xue, Kenan Zhang, Cheng Huo, Menglu Chen, "Cavity-enhanced infrared quantum dot homojunction arrays," Photonics Res. 13, 1497 (2025) Copy Citation Text show less
    Characterization of one resonant-cavity-enhanced CQD homojunction photodetector. (a) Schematic structure of the detector is depicted on the left. The upper-right inset displays a cross-sectional scanning electron microscopy (SEM) image of the device, and the bottom-right inset shows a magnified image of the CQD layer. Scale bar: 500 nm. (b) Electric field distribution of the detector. (c) Simulated absorption of CQD layer with different spacer thicknesses. (d) Simulated absorption of CQD layer with different gold contact thicknesses. (e) Simulated absorption of CQD layers with different upper gold thicknesses. (f) Simulated absorption of CQD layer with different CQD thicknesses.
    Fig. 1. Characterization of one resonant-cavity-enhanced CQD homojunction photodetector. (a) Schematic structure of the detector is depicted on the left. The upper-right inset displays a cross-sectional scanning electron microscopy (SEM) image of the device, and the bottom-right inset shows a magnified image of the CQD layer. Scale bar: 500 nm. (b) Electric field distribution of the detector. (c) Simulated absorption of CQD layer with different spacer thicknesses. (d) Simulated absorption of CQD layer with different gold contact thicknesses. (e) Simulated absorption of CQD layers with different upper gold thicknesses. (f) Simulated absorption of CQD layer with different CQD thicknesses.
    Resonance-enhanced CQD homojunction device characterization. (a) I–V curves comparing detectors with and without resonant-cavity-enhanced microstructures. (b) Noise spectra comparing detectors with and without resonant-cavity-enhanced microstructures. (c) Response spectra comparing detectors with and without resonant-cavity-enhanced microstructures.
    Fig. 2. Resonance-enhanced CQD homojunction device characterization. (a) IV curves comparing detectors with and without resonant-cavity-enhanced microstructures. (b) Noise spectra comparing detectors with and without resonant-cavity-enhanced microstructures. (c) Response spectra comparing detectors with and without resonant-cavity-enhanced microstructures.
    HgTe CQD spectrometer. (a) The detector line array and data processing section, and the schematic diagram of the line array post-processing circuit is shown on the right. (b1) Voltage spectra calculated following Eq. (1). (b2) Directly measured photovoltage spectra. (c) Response spectra of the detector at different positions. (d) Spectrogram after spectral differentiation from (c).
    Fig. 3. HgTe CQD spectrometer. (a) The detector line array and data processing section, and the schematic diagram of the line array post-processing circuit is shown on the right. (b1) Voltage spectra calculated following Eq. (1). (b2) Directly measured photovoltage spectra. (c) Response spectra of the detector at different positions. (d) Spectrogram after spectral differentiation from (c).
    Reconstructed spectrum. (a) Plot of photovoltage as a function of x at different positions before and after placing the sample. (b) Schematic spectral response curves for 256 different positions xn. (c) Comparison of spectra obtained with a commercial Fourier transform spectrometer and reconstructed spectra.
    Fig. 4. Reconstructed spectrum. (a) Plot of photovoltage as a function of x at different positions before and after placing the sample. (b) Schematic spectral response curves for 256 different positions xn. (c) Comparison of spectra obtained with a commercial Fourier transform spectrometer and reconstructed spectra.
    Picture of the detector array. (a) 4-inch wafer without drop-casting HgTe CQD. (b) 4-inch wafer after drop-casting HgTe CQD. (c) Line array detector with 256 pixels.
    Fig. 5. Picture of the detector array. (a) 4-inch wafer without drop-casting HgTe CQD. (b) 4-inch wafer after drop-casting HgTe CQD. (c) Line array detector with 256 pixels.
    Response speed of single pixel device.
    Fig. 6. Response speed of single pixel device.
    The I–V curves and CQD layer thickness tests. (a) I–V curves and 340 nm QD layer thickness tests for a resonant cavity-enhanced detector and a microstructured detector without a resonant cavity. (b) I–V curves and 470 nm QD layer thickness tests for a resonant cavity-enhanced detector and a microstructured detector without a resonant cavity. (c) I–V curves and 600 nm QD layer thickness tests for a resonant cavity-enhanced detector and a microstructured detector without a resonant cavity. (d) I–V curves and 400 nm QD layer thickness tests for a resonant cavity-enhanced detector and a microstructured detector without a resonant cavity.
    Fig. 7. The IV curves and CQD layer thickness tests. (a) IV curves and 340 nm QD layer thickness tests for a resonant cavity-enhanced detector and a microstructured detector without a resonant cavity. (b) IV curves and 470 nm QD layer thickness tests for a resonant cavity-enhanced detector and a microstructured detector without a resonant cavity. (c) IV curves and 600 nm QD layer thickness tests for a resonant cavity-enhanced detector and a microstructured detector without a resonant cavity. (d) IV curves and 400 nm QD layer thickness tests for a resonant cavity-enhanced detector and a microstructured detector without a resonant cavity.
    The I–V curves of other channels among the 256 pixels.
    Fig. 8. The IV curves of other channels among the 256 pixels.
    Simulation of quantum dots with different response wavelengths for devices of the same structure. (a) Simulated absorption of HgTe layers with different spacer thicknesses. (b) Simulated absorption of HgTe layers with different quantum dot thicknesses. (c) Spectral response of devices with and without resonant cavity enhancement.
    Fig. 9. Simulation of quantum dots with different response wavelengths for devices of the same structure. (a) Simulated absorption of HgTe layers with different spacer thicknesses. (b) Simulated absorption of HgTe layers with different quantum dot thicknesses. (c) Spectral response of devices with and without resonant cavity enhancement.
    Pictures of grating microscope observations. (a) 1 mm/100, (b) 1 mm/300, (c) 1 mm/600.
    Fig. 10. Pictures of grating microscope observations. (a) 1 mm/100, (b) 1 mm/300, (c) 1 mm/600.
    Physical picture of the detector array and the grating elements.
    Fig. 11. Physical picture of the detector array and the grating elements.
    Algorithm flow chart.
    Fig. 12. Algorithm flow chart.
    Training datasets comprising photovoltage and spectral eigenvalue. (a) Spectral response of a detector with resonant cavity at different xn, (b) spectral integration, (c) measured voltage. (d) Transmittance of filter 1. (e) Spectral response of a detector with resonant cavity enhancement under the condition of filter 1 at different positions, (f) measured voltage. (g) Transmittance of filter 2. (h) Spectral response with resonant cavity enhanced detector under the condition of filter 2 at different positions, (i) measured voltage.
    Fig. 13. Training datasets comprising photovoltage and spectral eigenvalue. (a) Spectral response of a detector with resonant cavity at different xn, (b) spectral integration, (c) measured voltage. (d) Transmittance of filter 1. (e) Spectral response of a detector with resonant cavity enhancement under the condition of filter 1 at different positions, (f) measured voltage. (g) Transmittance of filter 2. (h) Spectral response with resonant cavity enhanced detector under the condition of filter 2 at different positions, (i) measured voltage.
    Neural network self-learning filter transmittance library with (a) transmittance peaks of about 2.3 μm, (b) transmittance peaks of about 1.7 μm, and (c) transmittance peaks of about 1.9 μm.
    Fig. 14. Neural network self-learning filter transmittance library with (a) transmittance peaks of about 2.3 μm, (b) transmittance peaks of about 1.7 μm, and (c) transmittance peaks of about 1.9 μm.
    Schematic of the detector line array movement and the data processing section. (a) Schematic of the detector line array movement. (b) Spectral response curve when the line array detector is located at xn′. (c) Integral plot of spectral curves. (d) Spectrogram of panel (b) after performing spectral differencing.
    Fig. 15. Schematic of the detector line array movement and the data processing section. (a) Schematic of the detector line array movement. (b) Spectral response curve when the line array detector is located at xn. (c) Integral plot of spectral curves. (d) Spectrogram of panel (b) after performing spectral differencing.
    SpectrometerSensorSpectral Range (nm)Spectral Resolution (nm)Refs.
    AvaSpec-NIR (Avantes)InGaAs linear array200–11004.4–85[60]
    FieldSpec4 (ASD)Photodiode array350–250010[60]
    Luminar 5030 (Brimrose)InGaAs600–11002–10[60]
    SCiO (Consumer Physics)Photodiode array740–107028[61]
    NIRscan (Texas Instruments)Single InGaAs900–170010[61]
    MicroNIR Pro ES 1700 (VIAVI)InGaAs diode array908–167612.5[61]
    NeoSpectra (Si-Ware Systems)Single InGaAs1350–250016[61]
    Vis-NIR spectrometerCMOS300–170010[62]
    Single-photon spectrometerNbTiN nanowire1200–17005[26]
    Fourier transform microspectrometerInGaAS1100–17007.5[63]
    Photonic crystal film spectrometerCMOS450–6505[64]
    QD-SWIR spectrometerHgTe CQDs array1400–25007This work
    Table 1. Comparison of NIR Spectrometers between Reported Works and This Work