• Acta Optica Sinica
  • Vol. 4, Issue 10, 946 (1984)
XIB BEIXING
Author Affiliations
  • [in Chinese]
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    XIB BEIXING. A new type of automatic ellipsometer[J]. Acta Optica Sinica, 1984, 4(10): 946 Copy Citation Text show less

    Abstract

    In this paper, we describe a new electro-optical compensated automatic ellipsome-ter. The design principles are discussed in detail and the measurement results on SiO2 film are given. A new type of automatic spectrum-ellipsometer may be developed based on it.