• Acta Optica Sinica
  • Vol. 28, Issue 1, 189 (2008)
Meng Xiangfeng* and Li Lifeng
Author Affiliations
  • [in Chinese]
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    Meng Xiangfeng, Li Lifeng. Methods for Increasing Sidewall Steepness of Reactive Ion-Beam Etched, Sub-Micrometer-Period Gratings[J]. Acta Optica Sinica, 2008, 28(1): 189 Copy Citation Text show less
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    [3] K. Hehl, J. Bischoff, U. Mohaupt et al.. High-efficiency dielectric reflection gratings: design, fabrication, and analysis[J]. Appl. Opt., 1999, 38(30): 6257~6271

    [5] G. Aston, H. R. Kaufman, P. J. Wilbur. Ion beam divergence characteristics of two-grid accelerator systems[J]. AIAA J., 1978, 16(5) : 516~524

    [8] H. I. Smith, R. C. Williamson, W. T. Brogan. Ion beam etching of reflective array filters[C]. IEEE Ultrasonics Symposium, 1972. 198~201

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    Meng Xiangfeng, Li Lifeng. Methods for Increasing Sidewall Steepness of Reactive Ion-Beam Etched, Sub-Micrometer-Period Gratings[J]. Acta Optica Sinica, 2008, 28(1): 189
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