New device on measuring thin film stress by laser reflect measurement

[in Chinese]; [in Chinese]; [in Chinese]

Journals >Infrared and Laser Engineering >Volume 36 >Issue 5 >Page 693 > Article

Infrared and Laser Engineering
Vol. 36, Issue 5, 693 (2007)

New device on measuring thin film stress by laser reflect measurement

[in Chinese]^*, [in Chinese], and [in Chinese]

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[in Chinese]

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[in Chinese], [in Chinese], [in Chinese]. New device on measuring thin film stress by laser reflect measurement[J]. Infrared and Laser Engineering, 2007, 36(5): 693 Copy Citation Text

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Abstract

[in Chinese], [in Chinese], [in Chinese]. New device on measuring thin film stress by laser reflect measurement[J]. Infrared and Laser Engineering, 2007, 36(5): 693

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