[1] Ning Zhigao, Cheng Zhaogu, Gao Haijun. Error analysis of frequency mixing for heterodyne interferometer [J]. Chinese J. Lasers, 2005, 32(6): 852~855
[2] Guo Xinjun, Wang Ji, Yan Jiahua et al.. Research on a kind of polarized interferometer′s optical system for nanometer measurement [J]. Infrared and Laser Engineering, 2004, 33(1): 21~24
[3] Tae Bong Eom, Tae Young Choi, Keon Hee Lee et al.. A simple method for the compensation of the nonlinearity in the heterodyne interferometer[J]. Measurement Science and Technology, 2002, 13: 222~225
[4] Dai Gaoliang, Yin Chunyong, Xie Guangping. Study on drift of nonlinearity in nanometer precision heterodyne interferometers [J]. Acta Optica Sinica, 1998, 18(12): 1697~1702
[5] Wenmei Hou. Optical parts and the nonlinearity in heterodyne interferometers [J]. Precision Engineering, 2006, 30(3): 337~346
[6] Chen Hongfang, Ding Xuemei, Zhong Zhi et al.. Effect of nonlinearity by the rotation of the polarizer in laser heterodyne interferometric [J]. Chinese J. Lasers, 2005, 32(9): 1281~1285
[7] Zhong Zhi, Tan Jiubin, Chen Hongfang et al.. Nonlinearity from difference between transmission coefficients of PBS in laser heterodyne interferometer [J]. Opto-Electronic Engineering, 2005, 32(9): 27~30
[8] Chen Hongfang, Ding Xuemei, Zhong Zhi et al.. Effect of nonlinearity by the polarizer in laser heterodyne interferometric [J]. J. Optoelectronics·Laser, 2007, 18(4): 460~462
[9] Han Xudong, Ai Hua, Long Kehui. Study on a novel single frequency laser interferometer[J]. Opto-Electronic Engineering, 2002, 29(5): 49~51
[10] Guo Yanzhen, Qiu Zongming, Li Xin. Analysis and calculation on nonlinearity of the laser polarized interferometer [J]. Acta Metrologica Sinica, 1995, 16(4): 273~279
[11] Yang Jun, Liu Zhihai, Yuan Libo. Effects of wave plate on nonlinear errors in polarization laser interferometer[J]. Acta Photonica Sinica, 2008, 37(2): 364~369
[12] Peter Gregori, Toma Poar, Janez Moina. Quadrature phase-shift error analysis using a homodyne laser interferometer[J]. Opt. Express, 2009, 31(8): 16322~16331
[13] Wang Li, Zhao Baochang, Zhang Chunmin. Study on theory of polarizing Michelson interferometer for wind measurement based on polarizing arrays [J]. Acta Optica Sinica, 2008, 28(4): 700~704
[14] Liao Yanbiao. Polarization Optics [M]. Beijing: Science Press, 2003
[15] Kong Meimei, Gao Zhishan, Xu Lei et al.. Cyclic radial shearing interferometry based on polarization phase-shifting technique [J]. Acta Optica Sinica, 2010, 30(1): 127~131
[16] Zhou Shaolin, Yang Yong, Chen Wangfu. Dual-grating-based nanometer measurement [J]. Acta Optica Sinica, 2009, 29(3): 702~706
[17] Deng Yuanlong, Li Yuezhi, Wu Yuanbin et al.. Influence of metal-coated mirrors on measurement accuracy in heterodyne interferometric ellipsometry [J]. Chinese J. Lasers, 2009, 36(2): 439~443