Development of Photothermal Microactuator Based on Spectral Analysis of Photothermal Expansion Material

[2] Yu S, Piyabongkam D, Sezen A, et al. Sensors and Actuators A, 2002, 102: 49.

[3] Poosanaas P, Tonooaka K, Uchino K. Mechatronics, 2000, 10(4): 467.

[4] Bohm S, Burger G J, Korthorst M T, et al. Sensors and Actuators A, 2000, 80(1): 77.

[5] Wang G Z, Ji L H, Wen S Z. Chinese Journal of Mechanical Engineering, 2003, 39: 79.

[6] Kolesar E S, Ruff M D, Odom W E, et al. Thin Solid Films, 2002, 420-421: 530.

[7] Kenji U. Smart Materials and Structures, 1998, 7: 273.

[8] Kohl M, Skrobanek K D. Sensors and Actuators A, 1998, 70: 104.

[9] He Y L, Zhang H J, Zhang D X. Journal of Micromechanics and Microengineering, 2005, 15: 1637.

[10] Li L, Deepak U. Journal of Micromechanics and Microengineering, 2004, 14: 1734.

[12] Zhang D X, Zhang H J, Liu C, et al. Optics Express, 2008, 16(17): 13476.

[13] Baglio S, Castorina S, Fortuna L, et al. Sensors and Actuators A, 2002, 101: 185.

[14] Blaschke H, Kohlhaas J, Kadkhoda P, et al. SPIE, 2003, 4932: 536.

[15] Zhang D, Zhang H, Liu C, et al. Microscopy Research & Technique, 2008, 71(2): 119.