Yuewu Yan, Junming An, Jiashun Zhang, Liangliang Wang, Xiaojie Yin, Yuanda Wu, Yue Wang. Research Progress of Optical Phased Array Technology[J]. Laser & Optoelectronics Progress, 2018, 55(2): 020006
- Laser & Optoelectronics Progress
- Vol. 55, Issue 2, 020006 (2018)
Fig. 1. Schematic of optical phased array
![Schematic of the beam scanner in Ref. [16]](/richHtml/lop/2018/55/2/020006/img_2.jpg)
Fig. 2. Schematic of the beam scanner in Ref. [16]
Fig. 3. Ten waveguide optical phased array
Fig. 4. Schematic of the beam scanning component
Fig. 5. Schematic of the 16-channel grating array. (a) Device structure; (b) angle alignment of longitudinal axis and transverse axis
Fig. 6. Device structure and simulation. (a) Schematic of the silicon waveguide based optical phased array; (b) beam propagation simulation
Fig. 7. Nanophotonic phased array system
Fig. 8. Device structure and SEM scanning graphs. (a) 3D rendering of the optical phased array; SEM graphs of (b) cascaded phase shifter architecture, (c) close-up of the thermal phase shifters, (d) full-etch silicon grating based antennas
Fig. 9. Schematic of the phased array antenna[35]
Fig. 10. Schematic of optical phased array composed of HCG mirrors
Fig. 11. Schematic of MEMS phased array composed of HCG
Fig. 12. Schematic of phased array lidar
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Table 1. Comparison of three kinds of optical phased array
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