Minghao Shang, Feihong Yu. Research on Microscopic 3D Measurement System Based on Focus Variation[J]. Laser & Optoelectronics Progress, 2021, 58(16): 1600002
- Laser & Optoelectronics Progress
- Vol. 58, Issue 16, 1600002 (2021)
Fig. 1. Flow chart of microscopic 3D measurement system based on focus variation
Fig. 2. Multi-focus image sequence acquired by microscopic 3D measurement system based on focus variation
Fig. 3. Calculation of sample surface height using focus evaluation results
Fig. 4. Evaluation curve of focus quality
Fig. 5. Image fusion in transform domain
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Table 1. Measurement characteristics of non-contact surface morphological measurement algorithms
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