Study on Property and Formation of He+Ions Implanted LiNbO3Waveguide

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Journals >Acta Optica Sinica >Volume 16 >Issue 8 >Page 1215 > Article

Acta Optica Sinica
Vol. 16, Issue 8, 1215 (1996)

Study on Property and Formation of He⁺Ions Implanted LiNbO₃Waveguide

[in Chinese]¹, [in Chinese]², [in Chinese]³, [in Chinese]¹, and [in Chinese]¹

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¹[in Chinese]

²[in Chinese]

³[in Chinese]

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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Study on Property and Formation of He⁺Ions Implanted LiNbO₃Waveguide[J]. Acta Optica Sinica, 1996, 16(8): 1215 Copy Citation Text

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Abstract

Fabrication of LiNbO 3 crystal waveguides implanted by He + ions is reported in this paper. The effective refractive index of the guided modes were measured before and after annealing. The refractive index profiles were calculated and proved to be in agreement with the damage profile and range profile.

Keywords

LiNbO3 waveguide range profile refractive index profile He+ implantation

[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Study on Property and Formation of He⁺Ions Implanted LiNbO₃Waveguide[J]. Acta Optica Sinica, 1996, 16(8): 1215

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