[3] V. G. Kutchoukov, J. R. Mollinger, M. Shikida et al.. Patterning of polyimide and metal in deep trenches[J]. Sens. Actuators, 2001, (A92): 208～213

[5] Lih Y. Lin, Evan L. Goldstein. The roles of MEMS optical switches in fiber-optic networks-what and when[C]. Proc. SPIE, 2003, 5246: 85～94

[6] Jitendra Nath Roy, Anup Kumar Maiti, Sourangshu Mukhopadhyay. Designing of an all-optical time division multiplexing scheme with the help of nonlinear material based tree-net architecture[J]. Chin. Opt. Lett., 2006, 4(8): 483～486

[9] Fang Wang, Chun Lu, Zishun Liu et al.. Finite element simulation and theoretical analysis of fiber-optical switchs[J]. Sens. Actuators, 2002, (A96): 167～178