Jinhua Feng, Yan Tang, Zhongye Xie, Jing Du, Jianwen Gong. Coaxial Focusing Method Based on Differential Modulation Evaluation[J]. Acta Optica Sinica, 2021, 41(6): 0612001
- Acta Optica Sinica
- Vol. 41, Issue 6, 0612001 (2021)
Fig. 1. Coaxial focusing measurement system
Fig. 2. Analytical results of modulation based on two dimensional Fourier transform. (a) Analog diagram of acquired image; (b) spectrum distribution; (c) modulation distribution
Fig. 3. Corresponding relationship between the value of modulation and the height. (a) Longitudinal response curves of modulation; (b) linear mapping relationship between differential modulation and height
Fig. 4. Simulation results. (a) Images captured by CCD1; (b) images captured by CCD2; (c) linear distribution region of longitudinal response of differential modulation; (d) error distribution of defocusing
Fig. 5. Distribution of focusing error with noise
Fig. 6. Simulation curves of modulation under different differential quantities. (a) Response curves of modulation; (b) linear mapping relationship of differential modulation
Fig. 7. Experimental system
Fig. 8. Experimental curves of modulation under different differential quantities. (a) Response curves of modulation; (b) linear mapping relationship of differential modulation
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Table 1. Focusing range and accuracy of microscope objectives with different numerical apertures and magnifications
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Table 2. Measurement of focusing accuracyunit: μm
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