[1] K. Knop. Rigorous diffraction theory for transmission phase gratings with deep rect-angular grooves. J. Opt. Soc. Am., 1978, 68(9): 1206~1210
[2] P. B. Fischer, S. Y. Chou. Sub-50 nm high aspect-ration silicon pillars, ridges and trenches fabricated using ultrahigh resolution electron beam lithography and reactive ion etching. Appl. Phys. Lett., 1993, 62(12): 1414~1416
[3] E. Noponen, J. Turunen. Binary high-frequency-carrier diffractive optical elements: Electromagnetic theory. J. Opt. Soc. Am. (A), 1994, 11(3): 1097~1109
[5] E. B. Grann, M. G. Moharam. Hybrid two-dimensional subwavelength surface-relief grating-mesh structures. Appl. Opt., 1996, 35(5): 795~800
[6] E. Noponen, J. Turunen. Eigenmode method for electromagnetic synthesis of diffractive elements with three-dimensional profiles. J. Opt. Soc. Am. (A), 1994, 11(9): 2494~2502
[7] E. B. Grann, M. G. Moharam, D. A. Pommet. Artificial uniaxial and biaxial dielectrics with use of two-dimensional subwavelength binary gratings. J. Opt. Soc. Am. (A), 1994, 11(10): 2695~2703