Research Progress of Terahertz Waveplate Based on Metasurface

Zhuo Zhang; Yandong Gong; Ke Li

doi:10.3788/LOP202259.1300001

Journals >Laser & Optoelectronics Progress >Volume 59 >Issue 13 >Page 1300001 > Article

Laser & Optoelectronics Progress
Vol. 59, Issue 13, 1300001 (2022)

Research Progress of Terahertz Waveplate Based on Metasurface

Zhuo Zhang, Yandong Gong^*, and Ke Li

Author Affiliations

School of Instrument Science and Opto-Electronic Engineering, Beijing Information Science and Technology University, Beijing 100192, China

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DOI: 10.3788/LOP202259.1300001 Cite this Article Set citation alerts

Zhuo Zhang, Yandong Gong, Ke Li. Research Progress of Terahertz Waveplate Based on Metasurface[J]. Laser & Optoelectronics Progress, 2022, 59(13): 1300001 Copy Citation Text

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Fig. 1. THz-QWP structure based on natural materials. (a) THz-QWP based on quartz crystal^[13]; (b) THz-QWP based on graphene grating^[15]

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Fig. 2. Structure of the silicon grating^[18]

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Fig. 3. Structure of THz-HWP based on SPR. (a) Structure of two-unit cutting line pair^[25]; (b) HWP based on MIM structure^[30]

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Fig. 4. Structure of THz-HWP based on SRR. (a) Unit structure of the QWP; (b) metal layer structure of the rectangular split resonator^[32]

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Fig. 5. Structure of THz-HWP based on interference coupling. (a) Unit structure of the metasurface half-wave plate; (b) structure of the first metal film; (c) structure of the second metal film^[39]

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Fig. 6. Structure of THz-HWP based on Mie resonance. (a) Unit cell structure of the all-dielectric metamaterial; (b) top view of the unit cell; (c) bottom view of unit cell^[43]

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Fig. 7. Structure of switchable THz-WP. (a) Schematic diagram of the VO₂-metal hybrid metasurface; (b) top view of the cell structure^[51]

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Fig. 8. Structure of continuously tuned THz-WP. (a) Structure of the DFLC cell; (b) cross-section of DFLC^[54]

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Ref.	Year	Function	Frequency /THz	Material	Size	Bandwidth /%	Insertion loss /%	Structure
［12］	2006	QWP	0.92	quartz	32 mm	163.0	45	six quartz plates
［13］	2013	QWP	1.55	quartz	10 cm	32.3	50	nine pieces of quartz plates
［14］	2021	QWP	0.60	DSO	50 μm	33.3	91	（110）-cut DSO crystals
［14］	2021	QWP	0.56	DSO	370 μm	19.8	93	（001）-cut DSO crystals

Table 1. Performance comparison of THz-WP based on natural materials

Ref.	Year	Function	Frequency /THz	Material	Size	Bandwidth /%	Insertion loss /%	Structure
［18］	2015	QWP	0.64	silicon	500 μm	51.6	30	silicon grating
［19］	2016	HWP	1.05	silicon	950 μm	76.2	31	gradient grating
［20］	2021	HWP	0.14	polystyrene	4.8 mm	37.0	<10	low-index polymer grating
［20］	2021	HWP	0.30	polystyrene	4.8 mm	35.0	<15	low-index polymer grating

Table 2. Performance comparison of THz-WP based on dielectric grating

Ref.	Year	Function	Frequency /THz	Dielectricmaterial	Metal	Layer	Size /μm	Bandwidth /%	PCR /%	Mode	Transmission /%	Insertion loss /%	Structure
［25］	2009	QWP	1.30	bencocycl- obutene	Cu	2	110	2.9	~55	T	74	45	a cut-wire pair
［25］	2009	HWP	1.34	bencocycl- obutene	Cu	2	110	2.8	~34	T	58	66	a cut-wire pair
［26］	2014	QWP	1.07	polypropy- lene	Au	1	40	16.7	~30	T	55	70	a hole array
［26］	2014	QWP	2.29	polypropy- lene	Au	1	40	2.9	~5	T	23	95	a hole array
［27］	2018	HWP	1.1	polyimide	Au	1	25.3	54.5	65	R	/	20	metal rods
［28］	2020	QWP	0.28	cyclic olefin copolymer	Au	3	540	53.3	70	T	75	43	three metallic layers
［29］	2021	HWP	0.262	cyclic olefin copolymer	Au	3	125	31.7	~59	T	77	41	three metallic layers
［30］	2013	HWP	1.04	polyimide	Au	3	33	50.0	>50	R	/	20	cut-wire array
［31］	2017	HWP	1.165	polyimide	Au	1	33	84.0	>85	R	/	30	two pairs of patches

Table 3. Performance comparison of THz-WP based on SPR

Ref.	Year	Function	Frequency /THz	Dielectric material	Metal	Layer	Size /μm	Bandwidth /%	PCR /%	Transmission /%	Insertion loss /%	Structure
［32］	2009	QWP	0.64	polyimide	Au	1	20	15	99	/	50	SRR
［33］	2016	QWP	0.73	zeonor	Ti/Au	1	23	25	10‒41	32	59	SRR
［33］	2016	QWP	1.13	zeonor	Ti/Au	1	23	30	10‒41	~64	~90	SRR
［34］	2018	QWP	0.98	bisbenzoc-yclobutene	Al	2	48	12	64	80	36	SRR
［35］	2021	QWP	1.86	polyimide	Al	1	37	43	26	~26	92	wave-shape resonator

Table 4. Performance comparison of THz-WP based on resonator

Ref.	Year	Function	Frequency /THz	Dielectric material	Metal	Layer	Size	Bandwidth /%	PCR /%	Mode	Transmission /%	Insertion loss /%	Structure
［36］	2015	HWP	0.3	polyimide	stainless steel	3	270 μm	66	~100	T	95	10	metallic grating
［37］	2019	QWP	1.02	silicon	Au	3	44 μm	80	>90	R	/	8	dielectric pillar
［38］	2020	HWP	0.15	polypropy-lene	Al	2	100 μm	9	90	T	83	30	Zigzag shape
［39］	2020	HWP	0.695	polyimide	Al	2	18 mm	73	~80	T	97	20	S-shaped chained

Table 5. Performance comparison of THz-WP based on interference coupling

Ref.	Year	Function	Frequency /THz	Dielectric material	Size /μm	Bandwidth /%	PCR /%	Transmission /%	Insertion loss /%	Structure
［41］	2018	QWP	1.76	silicon	100	59	57	75	43	elliptical air holes
［42］	2018	HWP	0.73	silicon	200	35	68	82	33	two silicon antennas
［43］	2020	HWP	0.83	silicon	220	36	~60	77	40	two silicon pillars

Table 6. Comparison of THz-WP performance based on meter resonance

Ref.	Year	Function	Frequency /THz	Dielectric material	Metal	Layer	Size /μm	Bandwidth /%	PCR /%	External incentives
［47］	2020	HWP	2.20	polymer、VO₂	Au	3	22.2	18	99	temperature
［47］	2020	QWP	2.12/2.93	polymer、VO₂	Au	3	22.2	44/2	85	temperature
［48］	2020	HWP	0.99	cyclic olefin copolymer、VO₂	Au	4	75.6	83	98	temperature
［48］	2020	QWP	1.13	cyclic olefin copolymer、VO₂	Au	4	75.6	83	>90	temperature
［49］	2021	HWP	4.59	graphene、ZrO₂	Au	3	27.2	73	90	electrostatic gating
［49］	2021	QWP	5.46	graphene、ZrO₂	Au	3	27.2	37	>90	electrostatic gating
［50］	2021	HWP	1.00	polyimide、VO₂	Au	3	39.2	40	96	thermal，optical or electrical stimulus
［50］	2021	QWP	1.00	polyimide、VO₂	Au	3	39.2	40	~100	thermal，optical or electrical stimulus

Table 7. Performance comparison of switchable THz-WP

Ref.	Year	Function	Dielectric material	Metal	Size /μm	External incentives	Principle	Structure
［54］	2018	HWP/QWP	silica、DFLC	Cu	1600	square wave voltage	birefringence of DFLC	silica-DFLC-silica
［55］	2019	HWP/QWP	polydimethylsiloxane、SiO₂	Au、Cr	100	mechanically stretched	tight coupling	elementary resonators
［56］	2020	HWP/QWP	amorphous silicon	/	1500	angle tunable	photonic inverse	freeform metasurface
［57］	2021	HWP/QWP	silica、LC	Au	900	variable E-field	local resonance， LC birefringence	LC integrated metal grating

Table 8. Performance comparison of continuously tuned THz-WP

Zhuo Zhang, Yandong Gong, Ke Li. Research Progress of Terahertz Waveplate Based on Metasurface[J]. Laser & Optoelectronics Progress, 2022, 59(13): 1300001

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