• Acta Optica Sinica
  • Vol. 34, Issue s1, 112007 (2014)
Hou Maosheng*, Ji Lin, Liu Entao, Tian Yanrong, Ma Fei, and Zhao Weiqian
Author Affiliations
  • [in Chinese]
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    DOI: 10.3788/aos201434.s112007 Cite this Article Set citation alerts
    Hou Maosheng, Ji Lin, Liu Entao, Tian Yanrong, Ma Fei, Zhao Weiqian. Development of Precision One-Dimensional Adjustment Worktable Based on Aerostatic Bearing Technology[J]. Acta Optica Sinica, 2014, 34(s1): 112007 Copy Citation Text show less

    Abstract

    To achieve the high-precision one-dimensional adjustment of large surface under test in optical and mechanical measurements, a novel worktable based on the aerostatic bearing technology is developed. In the worktable, pitch or tilting motion is achieved by a cambered surface of aerostatic bearing and micro-displacement actuators, and the relationship between the angle of one-dimensional adjustment and the displacement of actuators is analyzed. Furthermore, by using an electronic autocollimator, the resolution of one-dimensional adjustment worktable is measured. Errors of the one-dimensional adjustment system are analyzed and the performance evaluation of the system is given. The experimental results show that the worktable has a pitch or tilting adjustment resolution of 1.2″, adjustment range of ±1° and good stability with 50 kg load. The developed one-dimensional adjustment worktable can satisfy the requirements of higher precision, high resolution, large adjustment range, frictionless, high load stiffness, stabilization and small driving force.
    Hou Maosheng, Ji Lin, Liu Entao, Tian Yanrong, Ma Fei, Zhao Weiqian. Development of Precision One-Dimensional Adjustment Worktable Based on Aerostatic Bearing Technology[J]. Acta Optica Sinica, 2014, 34(s1): 112007
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