High numerical aperture RGB achromatic metalens in the visible

Sangwon Baek; Joohoon Kim; Yeseul Kim; Won Seok Cho; Trevon Badloe; Seong-Won Moon; Junsuk Rho; Jong-Lam Lee

doi:10.1364/PRJ.470004

[1] G. Zheng, H. Mühlenbernd, M. Kenney, G. Li, T. Zentgraf, S. Zhang. Metasurface holograms reaching 80% efficiency. Nat. Nanotechnol., 10, 308-312(2015).

[2] L. Wang, S. Kruk, H. Tang, T. Li, I. Kravchenko, D. N. Neshev, Y. S. Kivshar. Grayscale transparent metasurface holograms. Optica, 3, 1504-1505(2016).

[3] Z.-L. Deng, J. Deng, X. Zhuang, S. Wang, K. Li, Y. Wang, Y. Chi, X. Ye, J. Xu, G. P. Wang, R. Zhao, X. Wang, Y. Cao. Diatomic metasurface for vectorial holography. Nano Lett., 18, 2885-2892(2018).

[4] H.-C. Wang, C. H. Chu, P. C. Wu, H.-H. Hsiao, H. J. Wu, J.-W. Chen, W. H. Lee, Y.-C. Lai, Y.-W. Huang, M. L. Tseng, S.-W. Chang, D. P. Tsai. Ultrathin planar cavity metasurfaces. Small, 14, 1703920(2018).

[5] I. Kim, H. Jeong, J. Kim, Y. Yang, D. Lee, J. Rho. Holographic metasurface gas sensors for instantaneous visual alarms. Adv. Opt. Mater., 9, 2100609(2021).

[6] J. Kim, Y. Yang, T. Badloe, I. Kim, G. Yoon, J. Rho. Geometric and physical configurations of meta-atoms for advanced metasurface holography. InfoMat, 3, 739-754(2021).

[7] J. Kim, D. Jen, J. Seong, T. Badloe, N. Jeon, G. Kim, S. Baek, J.-L. Lee, J. Rho. Photonic encryption platform via dual-band vectorial metaholograms in the ultraviolet and visible. ACS Nano, 16, 3546-3553(2022).

[8] J. Kim, D. K. Oh, H. Kim, G. Yoon, C. Jung, J. Kim, T. Badloe, H. Kang, S. Kim, Y. Yang, J. Lee, B. Ko, J. G. Ok, J. Rho. Metasurface holography reaching the highest efficiency limit in the visible via one-step nanoparticle-embedded-resin printing. Laser Photon. Rev., 16, 2200098(2022).

[9] M. A. Naveed, J. Kim, I. Javed, M. A. Ansari, J. Seong, Y. Massoud, T. Badloe, I. Kim, K. Riaz, M. Zubair, M. Q. Mehmood, J. Rho. Novel spin-decoupling strategy in liquid crystal-integrated metasurfaces for interactive metadisplays. Adv. Opt. Mater., 10, 2200196(2022).

[10] H. S. Khaliq, J. Kim, T. Naeem, K. Riaz, T. Badloe, J. Seong, J. Akbar, M. Zubair, M. Q. Mehmood, Y. Massoud, J. Rho. Broadband chiro-optical effects for futuristic meta-holographic displays. Adv. Opt. Mater., 10, 2201175(2022).

[11] B. Xiong, Y. Xu, J. Wnag, L. Li, L. Deng, F. Cheng, R.-W. Peng, M. Wang, Y. Liu. Realizing colorful holographic mimicry by metasurfaces. Adv. Mater., 33, 2005864(2021).

[12] W. Bai, P. Yang, S. Wang, J. Huang, D. Chen, Z. Zhang, J. Yang, B. Xu. Tunable duplex metalens based on phase-change materials in communication range. Nanomaterials, 9, 993(2019).

[13] Y. Bao, S. Zu, W. Liu, L. Zhou, X. Zhu, Z. Fang. Revealing the spin optics in conic-shaped metasurfaces. Phys. Rev. B, 95, 081406(2017).

[14] J. Lin, J. P. B. Mueller, Q. Wang, G. Yuan, N. Antoniou, X.-C. Yuan, F. Capasso. Polarization-controlled tunable directional coupling of surface plasmon polaritons. Science, 340, 331-334(2013).

[15] L. Liu, X. Zhang, M. Kenney, X. Su, N. Xu, C. Ouyang, Y. Shi, J. Han, W. Zhang, S. Zhang. Broadband metasurfaces with simultaneous control of phase and amplitude. Adv. Mater., 26, 5031-5036(2014).

[16] G.-Y. Lee, G. Yoon, S.-Y. Lee, H. Yun, J. Cho, K. Lee, H. Kim, J. Rho, B. Lee. Complete amplitude and phase control of light using broadband holographic metasurfaces. Nanoscale, 10, 4237-4245(2018).

[17] A. Arbabi, Y. Horie, M. Bagheri, A. Faraon. Dielectric metasurfaces for complete control of phase and polarization with subwavelength spatial resolution and high transmission. Nat. Nanotechnol., 10, 937-943(2015).

[18] J. P. B. Mueller, N. A. Rubin, R. C. Devlin, B. Groever, F. Capasso. Metasurface polarization optics: independent phase control of arbitrary orthogonal states of polarization. Phys. Rev. Lett., 118, 113901(2017).

[19] F. Aieta, M. A. Kats, P. Genevet, F. Capasso. Multiwavelength achromatic metasurfaces by dispersive phase compensation. Science, 347, 1342-1345(2015).

[20] A. Tittl, M. G. Harats, R. Walter, X. Yin, M. Schäferling, N. Liu, R. Rapaport, H. Giessen. Quantitative angle-resolved small-spot reflectance measurements on plasmonic perfect absorbers: impedance matching and disorder effects. ACS Nano, 8, 10885-10892(2014).

[21] C. C. Chen, A. Ishikawa, Y. H. Tang, M. H. Shiao, D. P. Tsai, T. Tanaka. Metamaterials: uniaxial-isotropic metamaterials by three-dimensional split-ring resonators. Adv. Opt. Mater., 3, 44-48(2015).

[22] J. Kim, J. Seong, Y. Yang, S.-W. Moon, T. Badloe, J. Rho. Tunable metasurfaces towards versatile metalenses and metaholograms: a review. Adv. Photon., 4, 024001(2022).

[23] S.-W. Moon, C. Lee, Y. Yang, J. Kim, T. Badloe, C. Jung, G. Yoon, J. Rho. Tutorial on metalenses for advanced flat optics: design, fabrication, and critical considerations. J. Appl. Phys., 131, 091101(2022).

[24] G. Yoon, K. Kim, S.-U. Kim, S. Han, H. Lee, J. Rho. Printable nanocomposite metalens for high-contrast near-infrared imaging. ACS Nano, 15, 698-706(2021).

[25] S.-W. Moon, Y. Kim, G. Yoon, J. Rho. Recent progress on ultrathin metalenses for flat optics. iScience, 23, 101877(2020).

[26] W. Kim, G. Yoon, J. Kim, H. Jeong, Y. Kim, H. Choi, T. Badloe, J. Rho, H. Lee. Thermally-curable nanocomposite printing for the scalable manufacturing of dielectric metasurfaces. Microsyst. Nanoeng., 8, 73(2022).

[27] M. A. Naveed, J. Kim, M. A. Ansari, I. Kim, Y. Massoud, J. Kim, D. K. Oh, T. Badloe, J. Lee, Y. Kim, D. Jeon, J. Choi, M. Zubair, M. Q. Mehmood, J. Rho. Single-step fabricable flexible metadisplays for sensitive chemical/biomedical packaging security and beyond. ACS Appl. Mater. Interfaces, 14, 31194-31202(2022).

[28] T. Badloe, J. Kim, I. Kim, W.-S. Kim, W. S. Kim, Y.-K. Kim, J. Rho. Liquid crystal-powered Mie resonators for electrically tunable photorealistic color gradients and dark blacks. Light Sci. Appl., 11, 118(2022).

[29] L. Li, K. Yao, Z. Wang, Y. Liu. Harnessing evanescent waves by bianisotropic metasurfaces. Laser Photon. Rev., 14, 1900244(2020).

[30] R. Jin, L. Tang, J. Li, J. Wang, Q. Wang, Y. Liu, Z.-G. Dong. Experimental demonstration of multidimensional and multifunctional metalenses based on photonic spin Hall effect. ACS Photon., 7, 512-518(2020).

[31] W. Ma, Y. Xu, B. Xiong, L. Deng, R.-W. Peng, M. Wang, Y. Liu. Pushing the limits of functionality-multiplexing capability in metasurface design based on statistical machine learning. Adv. Mater., 34, 2110022(2022).

[32] E. Arbabi, J. Li, R. J. Hutchins, S. M. Kamali, A. Arbabi, Y. Horie, P. V. Dorpe, V. Gradinaru, D. A. Wagenaar, A. Faraon. Two-photon microscopy with a double-wavelength metasurface objective lens. Nano Lett., 18, 4943-4948(2018).

[33] G. Yoon, K. Kim, D. Huh, H. Lee, J. Rho. Single-step manufacturing of hierarchical dielectric metalens in the visible. Nat. Commun., 11, 2268(2020).

[34] G. Y. Lee, J. Y. Hong, S. Hwang, S. Moon, H. Kang, S. Jeon, H. Kim, J. H. Jeong, B. Lee. Metasurface eyepiece for augmented reality. Nat. Commun., 9, 4562(2018).

[35] T. Badloe, I. Kim, Y. Kim, J. Kim, J. Rho. Electrically tunable bifocal metalens with diffraction-limited focusing and imaging at visible wavelengths. Adv. Sci., 8, 2102646(2021).

[36] W. T. Chen, A. Y. Zhu, M. Khorasaninejad, Z. Shi, V. Sanjeev, F. Capasso. Immersion meta-lenses at visible wavelengths for nanoscale imaging. Nano Lett., 17, 3188-3194(2017).

[37] H. Liang, Q. Lin, X. Xie, Q. Sun, Y. Wang, L. Zhou, L. Liu, X. Yu, J. Zhou, T. F. Krauss, J. Li. Ultrahigh numerical aperture metalens at visible wavelengths. Nano Lett., 18, 4460-4466(2018).

[38] R. Paniagua-Dominguez, Y. F. Yu, E. Khaidarov, S. Choi, V. Leong, R. M. Bakker, X. Liang, Y. H. Fu, V. Valuckas, L. A. Krivitsky, A. I. Kuznetsov. A metalens with a near-unity numerical aperture. Nano Lett., 18, 2124-2132(2018).

[39] Z. B. Fan, Z. K. Shao, M. Y. Xie, X. N. Pang, W. S. Ruan, F. L. Zhao, Y. J. Chen, S. Y. Yu, J. W. Dong. Silicon nitride metalenses for close-to-one numerical aperture and wide-angle visible imaging. Phys. Rev. Appl., 10, 014005(2018).

[40] W. T. Chen, A. Y. Zhu, V. Sanjeev, M. Khorasaninejad, Z. Shi, E. Lee, F. Capasso. A broadband achromatic metalens for focusing and imaging in the visible. Nat. Nanotechnol., 13, 220-226(2018).

[41] S. Wang, P. C. Wu, V.-C. Su, Y.-C. Lai, M.-K. Chen, H. Y. Kuo, B. H. Chen, Y. H. Chen, T.-T. Huang, J.-H. Wang, R.-M. Lin, C.-H. Kuan, T. Li, Z. Wang, S. Zhu, D. P. Tsai. A broadband achromatic metalens in the visible. Nat. Nanotechnol., 13, 227-232(2018).

[42] S. Shrestha, A. C. Overvig, M. Lu, A. Stein, N. Yu. Broadband achromatic dielectric metalenses. Light Sci. Appl., 7, 85(2018).

[43] F. Balli, M. Sultan, S. K. Lami, J. T. Hasting. A hybrid achromatic metalens. Nat. Commun., 11, 3892(2020).

[44] O. Avayu, E. Almeida, Y. Prior, T. Ellenbogen. Composite functional metasurfaces for multispectral achromatic optics. Nat. Commun., 8, 14992(2017).

[45] Y. Zhou, I. I. Kravchenko, H. Wang, J. R. Nolen, G. Gu, J. Valentaine. Multilayer noninteracting dielectric metasurfaces for multiwavelength metaoptics. Nano Lett., 18, 7529-7537(2018).

[46] E. Arbabi, A. Arbabi, S. M. Kamali, Y. Horie, A. Faraon. Multiwavelength polarization-insensitive lenses based on dielectric metasurfaces with meta-molecules. Optica, 3, 628-633(2016).

[47] E. Arbabi, A. Arbabi, S. M. Kamali, Y. Horie, A. Faraon. Multiwavelength metasurfaces through spatial multiplexing. Sci. Rep., 6, 32803(2016).

[48] D. Lin, A. L. Holsteen, E. Maguid, G. Wetzstein, P. G. Kik, E. Hasman, M. L. Brongersma. Photonic multitasking interleaved Si nanoantenna phased array. Nano Lett., 16, 7671-7676(2016).

[49] M. Khorasaninejad, F. Aieta, P. Kanhaiya, M. A. Kats, P. Genevet, D. Rousso, F. Capasso. Achromatic metasurface lens at telecommunication wavelengths. Nano Lett., 15, 5358-5362(2015).

[50] Y. Yang, G. Yoon, S. Park, S. D. Namgung, T. Badloe, K. T. Nam, J. Rho. Revealing structural disorder in hydrogenated amorphous silicon for a low-loss photonic platform at visible frequencies. Adv. Mater., 33, 2005893(2021).

[51] S. Baek, J. Y. Park, J.-L. Lee. Multiwavelength metalens by spatial multiplexing at visible wavelengths. J. Opt., 23, 075102(2021).

[52] N. Yu, F. Capasso. Flat optics with designer metasurfaces. Nat. Mater., 13, 139-150(2014).

[53] N. Yu, P. Genevet, M. A. Kats, F. Aieta, J.-P. Tetienne, F. Capasso, Z. Gaburro. Light propagation with phase discontinuities: generalized laws of reflection and refraction. Science, 334, 333-337(2011).

[54] J.-S. Park, S. Zhang, A. She, W. T. Chen, P. Lin, K. M. A. Yousef, J.-X. Cheng, F. Capasso. All-glass, large metalens at visible wavelength using deep ultraviolet projection lithography. Nano Lett., 19, 8673-8682(2019).

[55] M. Zhao, M. K. Chen, Z.-P. Zhuang, Y. Zhang, A. Chen, Q. Chen, W. Liu, J. Wang, Z.-M. Chen, B. Wang, X. Liu, H. Yin, S. Xiao, L. Shi, J.-W. Dong, J. Zi, D. P. Tsai. Phase charaterisation of metalenses. Light Sci. Appl., 10, 52(2021).

[56] P. Borowicz, M. Latek, W. Rzodkiewicz, A. Laszcz, A. Czerwinski, J. Ratajczak. Deep-ultraviolet Raman investigation of silicon oxide: thin film on silicon substrate versus bulk material. Adv. Nat. Sci: Nanosci. Nanotechnol., 3, 045003(2012).

[57] Y. Zhou, T. Hu, Y. Li, N. Li, Y. Dong, D. Li, Y. H. Fu, Q. Zhong, Z. Xu, S. Zhu, Q. Lin, Z. Singh. A performance study of dielectric metalens with process-induced defects. IEEE Photon. J., 12, 4500414(2020).

[58] Z. Li, P. Lin, Y.-W. Huang, J.-S. Park, W. T. Chen, Z. Shi, C.-W. Qiu, J.-X. Cheng, F. Capasso. Meta-optics achieves RGB-achromatic focusing for virtual reality. Sci. Adv., 7, eabe4458(2021).

[59] Z.-B. Fan, H.-Y. Qiu, H.-L. Zhang, X.-N. Pang, L.-D. Zhou, L. Liu, H. Ren, Q.-H. Wang, J.-W. Dong. A broadband achromatic metalens array for integral imaging in the visible. Light Sci. Appl., 8, 67(2019).